Used ADE / KLA / TENCOR MicroXAM #9181335 for sale

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ID: 9181335
Optical profilometer.
ADE / KLA / TENCOR MicroXAM is a comprehensive wafer testing and metrology equipment designed to address today's increasingly complex metrology and defect inspection challenges. The system combines leading-edge optics, automation, and image processing algorithms to provide accurate, non-destructive thickness measurements and defect detection. This all-in-one unit also enables extremely high throughput, flexibility and scalability, offering very fast data access and detailed analysis and reporting. ADE MicroXAM's core features include: Automated wafer mapping - the machine utilizes advanced scanners to accurately map each wafer's topography and defect contours. High resolution imaging - the imaging subsystem supports a wide variety of optical configurations for resolution, large field of view and optimal detection performance. High throughput - optimized strategies enable the tool to provide high-throughput quality wafer testing. Defect inspection - KLA MicroXAM can detect defects, such as particle contamination, crack propagation, and corner discolorations, with exceptionally high accuracy. Simultaneous wafer measurement - the asset is capable of automatically measuring multiple wafers at once. Scalability - the model can be scaled in order to increase automated testing speeds and throughput. Flexible wafer handling - TENCOR MicroXAM offers multiple wafer-handling mechanisms, including conveyor and rotating cassettes, that enable fast and reliable loading and unloading of wafers. Fast data access - data can be transferred to other analysis and reporting systems in seconds. Superior reporting capabilities - powerful reporting tools allow for detailed monitoring and control of both process yields and the actual measurement operation. MicroXAM is ideal for effectively addressing the unique needs of both advanced node devices and the more traditional SiGe, compound semiconductor and MEMS applications. This powerful equipment is highly reliable and customizable, and when combined with automated fabrication processes, delivers accurate, repeatable data for improved process understanding, monitoring and control.
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