Used ADE / KLA / TENCOR UltraGage 9520 #9182330 for sale

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ID: 9182330
Wafer measurement system Includes: ASC Controller Dual autoloader.
ADE / KLA / TENCOR UltraGage 9520 Wafer Testing and Metrology Equipment is a best-in-class solution for semiconductor device fabrication and testing. It features a full suite of advanced metrology capabilities, allowing users to accurately measure and monitor the quality of their substrates and wafers during manufacturing processes. ADE UltraGage 9520 provides the highest resolution and repeatability available in a system of its kind. KLA UltraGage 9520 utilizes 3D laser interferometry to measure up to 10,000 characteristics per wafer in real time. The unit is capable of non-contact surface scanning with a wafer location accuracy of ±5 µm across the entire wafer. The measurement data is captured and stored in a database, enabling users to analyze results and adjust their processes as needed to ensure high quality results. TENCOR UltraGage 9520 is also capable of controlling multiple processes in parallel to optimize the testing process. For example, it can be configured to precisely control the pressure and temperature of the process, and can detect and adjust parameters for uniformity, thickness, wafer edge alignment, and other specific features. The machine includes user-definable test protocols, self-calibration, and can measure a wide range of substrate materials, including crystalline and non-crystalline silicon, gallium nitride, and silicon carbide. In addition, UltraGage 9520 features several advanced optics packages, including a partial wafer imaging tool, enabling higher resolution measurement and more accurate determination of substrate defects. The asset also includes a high-speed USB optical interface which can transfer data up to 10 megabits per second. This feature significantly reduces the time it takes to view measurements and adjust processing parameters. ADE / KLA / TENCOR UltraGage 9520 provides world-class accuracy and repeatability, enabling manufacturers to identify and characterize substrate characteristics more accurately than ever before. This superior precision enables users to improve the quality of their substrates and increase the yield of their production. Moreover, the model is capable of handling a large volume of wafers quickly and efficiently - while its advanced ergonomic design ensures user comfort and ease-of-use even during long test cycles.
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