Used AKRION HL 2000 #9157799 for sale

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AKRION HL 2000
Sold
Manufacturer
AKRION
Model
HL 2000
ID: 9157799
Wafer Size: 8"
Wet station, 8".
AKRION HL 2000 is a wet station designed to provide a complete wet etch equipment for semiconductor and microelectronic device fabrication. It is a versatile platform for etching, cleaning and HF acid removal processes. The system is capable of handling up to four wafers and is designed to compress processing time and reduce chemical usage. HL 2000 is configured with a single chamber with multiple cassette options. It features a fully automated loading and unloading process for wafers, and the chamber is designed to prevent chemical vapor and other contaminants from entering the unit. An optional process controller allows for remote operation and monitoring. The machine is equipped with two gas distribution systems so the user can create their own process recipe. The vacuum pump tool provides up to 5" mercury vacuum and temperature control. The scrubber protects operators from hazardous exhaust. AKRION HL 2000 also includes wet process controls such as backfill and frontfill of the process chamber. These controls help regulate the amount of HF acid used for etching and cleaning. The asset also features an advanced integrated chemical feed model for more efficient and consistent process results. The integrated controller tracks necessary parameters including temperature, flow rate, and time for advanced process control. The equipment also offers advanced integrated process monitoring capabilities with In-Chamber imaging and particle detection. The optional chemical recycle module helps reduce chemical and wastewater cost while providing a cleaner process. Overall, HL 2000 is designed to provide a safe, integrated and reliable wet etch system. It is capable of providing high quality results with quick and efficient processing for a wide range of semiconductor and microelectronic devices.
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