Used ASM A 600 UHV #195781 for sale

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ASM A 600 UHV
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ID: 195781
Selective deposition LPCVD systems, 8" Process: SiH4 / Ph3 anneal, (2) chambers Software version: Windows NTVer.4.0 Service Pack 4 OS9 Ver.3.03 Vacuum pump included 1999 vintage.
ASM A 600 UHV is a diffusion furnace and accessory set designed for the purpose of ultra-high vacuum (UHV) preparation, processing, and thin film deposition. It is comprised of a vacuum chamber, electrical heating elements, power supplies, safety interlocks, digital load control equipment, and an automated deposition control module. The vacuum chamber is constructed of stainless steel and has a cylindrical design with an internal diameter of 600mm. It is equipped with two water-cooled cold traps mounted on the top and bottom that help prevent water vapor from reaching the substrate. The electrical heating elements of A 600 UHV are borosilicate-glass tubes with embedded Nichrome elements. These Nichrome elements are connected in series to a power supply unit, allowing for the precise manipulation of the temperature within the vacuum chamber. The power supplies are embedded in the chamber wall, allowing for the insulation and safe control of the heating elements. The control system utilizes digital load controllers and PID (Proportional Integral Derivative) algorithms that monitor and adjust the temperature with an accuracy of 0.1 degree C. ASM A 600 UHV also comes with a number of safety features designed to protect personnel and equipment. These include over temperature control, emergency stop, pressure safety interlock, and power supply lockout. Additionally, the entire unit is designed to operate at a pressure of UHV (10^-11 to 10^-9 atmospheres). This provides an extremely low contamination environment for surface preparation. The final component of the set is an automated deposition control module. This module allows for multiple deposition cycles with precise control of deposition time and gas flows. It is equipped with an auto-initialization feature that helps maintain exact control of the process parameters. This ensures repeatable and consistent deposition results. In conclusion, A 600 UHV is a reliable, versatile ultra-high vacuum machine that is specifically designed for deposition and coating processes. It has a number of features, such as digital temperature and pressure control, safety interlocks, and automated deposition control, that help maintain accuracy and repeatability. These features make it an ideal choice for industrial and laboratory applications.
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