Used HITACHI / KOKUSAI DD-833V #9161747 for sale

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HITACHI / KOKUSAI DD-833V
Sold
ID: 9161747
Wafer Size: 6"
Furnace, 6" Process: Wet oxidation Main frame Utility box.
HITACHI / KOKUSAI DD-833V is a high performance diffusion furnace specifically designed for the controlled thermal processing of a wide range of semiconductor materials. This powerful, efficient furnace features a unique three-zone exhaust system that provides maximum thermal processing efficiency and flexibility. The system has been engineered to operate in a variety of different temperature ranges and chemical atmospheres, making it ideal for applications such as high temperature doping and annealing processes, as well as the production of multilayer metallization structures. Expanded heat-zone flexibility further allows greater control of processing temperatures, resulting in improved process reproducibility and repeatability. HITACHI DD-833V features a high temperature range from low thermal reaction to temperatures up to 1150°C. Uniform temperatures are maintained throughout the furnace thanks to the use of a unique, split-element infrared (IR) radiation heating system which enables three independently controlled heating zones. Each zone is incorporated with an independent infrared radiative element controller which precisely controls the temperature of each zone within +/- 3°C accuracy. KOKUSAI DD 833V is equipped with a built-in cooling fan which is designed to efficiently exhaust fumes and smoke generated from the thermal processes. This cooling fan is also helpful in maintain a safe working environment for the user. The quality of gas supplied to the furnace is further assured by the furnace's mechanism for automatically controlling/adjusting the air flow rate. DD 833V comes as standard with a wide range of accessories and optional features such as a scrubber unit to remove any oxygen or by-products generated by the thermal processes, various gas lines for attaching the optional scrubber and furnaces, as well as graphite alumina and ceramic materials for protecting the wafer from over-processing or burning. KOKUSAI DD-833V is a powerful diffusion furnace that is designed to offer users versatile process capabilities, improved thermal processing performance, and the highest level of operator safety. Equipped with a robust construction and high temperature range, HITACHI DD 833V is an ideal tool for meeting the demands of semiconductor production.
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