Used KOKUSAI DJ-802V #9094687 for sale

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KOKUSAI DJ-802V
Sold
ID: 9094687
Vintage: 1991
Nitride furnace 1991 vintage.
KOKUSAI DJ-802V is a diffusion furnace and accessory that can be used for a variety of tasks related to the production of semiconductors and semiconductor components. KOKUSAI DJ 802 V is capable of performing high-quality doping, annealing, and oxidation processes. DJ-802V is a completely self-contained unit, and includes a vacuum chamber, chamber heater, and a gas delivery system. DJ 802 V provides users with a process chamber capable of temperatures of up to 1100° Celsius. The process chamber is constructed of chromium plated rectangular stainless steel and is insulated with molybdenum disilicide heating elements. The excellent thermal insulation of the process chamber ensures quick temperature ramping and tight temperature control. KOKUSAI DJ-802V is also equipped with an advanced gas delivery system that is capable of admitting nitrogen and different precursors. A high vacuum pump system with magnetic levitation coupling is installed inside the unit to provide the requisite vacuum levels required by the process. An optional RF generator is available for low pressure PECVD processes. The process chamber has two quartz top-load ports for sample introduction and observation and two substrate-holder holders for loading large wafers and samples. The process chamber can hold up to 200 x 300 mm wafers with a thickness up to 4mm. A controller and software package enable users to interact with the unit and control all aspects of the furnace. All process parameters can be adjusted remotely from a user interface. The unit is also equipped with several safety features to prevent accidental breakage or damage to the unit. All components of KOKUSAI DJ 802 V have been tested and certified to meet stringent safety standards. DJ-802V is a reliable and robust diffusion furnace that is suitable for many tasks related to semiconductor production. With its high temperature capabilities, advanced safety features, and software-driven controller, DJ 802 V stands out as a versatile diffusion furnace and accessory set.
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