Used KOKUSAI DJ-853 #155816 for sale
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ID: 155816
Diffusion oxide furnaces
N2, O2, N2O, H2, HCL Process gas
Halpox Process
1999 vintage.
KOKUSAI DJ-853 is a high-performance diffusion furnace designed for sensitive semiconductor device manufacturing applications. It is capable of accepting wafers up to eight inches in diameter and has a convenient operating temperature range of -20°C to 1200°C. DJ-853 features a uniform process chamber with impervious alumina liners that is sealed with a bell type lid. An active lifting equipment ensures consistent movement and the heaters are precisely positioned to guarantee uniform heating power distribution. The saturation vapor pressure of nitrogen and hydrogen is easily controllable to provide an ultra-low pyrogenic atmosphere. The heater can be operated either by manual programming, or in automatic mode with programmable parameters. In addition to its diffusion capabilities, KOKUSAI DJ-853 also features several safety features for increased user protection. The heaters are designed with a Bakelizer system, which uses small, low wattage ceramic insulation panels that suppress emissions to protect users from high frequency radiation. A large, durable quartz window allows for easy viewing of the process chamber at all times. The clamps and bell lid are constructed from robust pure molybdenum material and equipped with a high-performance temperature-sensing circuit to ensure an airtight seal. The onboard power supply is designed with a dynamic current adjustment feature which ensures stable heating even at fluctuating line voltages. DJ-853 also comes with an extensive range of accessories to support its diffusion functions. These include vibration-resistant work stands and fixtures that prevent sample shifting; cart-mount systems to support up to three furnaces; an offline cooling unit that ensures rapid cooling prior to unloading; and a multi-furnace control machine that allows for simultaneous control of multiple furnaces. In addition, KOKUSAI DJ-853 boasts a powerful software package with intuitive operation, data analysis, and tool diagnostics for comprehensive analysis of user processes. In conclusion, DJ-853 is a reliable thermal processing tool that is well-suited for demanding semiconductor device manufacturing applications. It offers superior diffusion capabilities, superior safety features, and a comprehensive range of accessories for increased user convenience.
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