Used SVG / THERMCO / AVIZA RVP 300 #9075734 for sale

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SVG / THERMCO / AVIZA RVP 300
Sold
ID: 9075734
Wafer Size: 12"
TEOS Furnaces, 12" Currently in fab.
SVG / THERMCO / AVIZA RVP 300 is a high-quality diffusion furnace and accessories for thermal and electrical processing applications in professional lab settings. This combination equipment includes a vacuum-sealed process chamber with a capacity of up to 300 cc, a solid-state process controller, and a variety of additional components to facilitate advanced processes. The process chamber is made of highly heat-conductive material and is designed for greater efficiency with the use of RF heating. It is also compatible with thermally-conductive gas which can be used to perform rapid thermal processes, and a fast-ramp heating capability of 600°C/second for increased throughput. For applications requiring precision temperature control, the process controller can provide precise temperature regulation with targeting accuracy of ±0.5°C. It is able to monitor both process chamber temperature and gas pressure, and features overheat protection for safety. Additional features of this system include an automated, continuous vacuum cycle with a chamber pumping speed of 10 m3/h, a chamber pressure range of 100 mTorr to 8016 mTorr, and features a rotatable drive for wafer/dummy loading and unloading. Both wafer and dummy loading ports are present, and the drive's adjustable speed facilitates loading and unloading operations. The unit also includes a temperature inlet supply for gas heating and a 6-scene programmable gas mixing console capable of up 1800°C. It allows for precise control of process gases to produce the desired thermal effects during processing. An integrated gas scrubber also allows for the removal of unreacted gas after a process is complete. Overall, SVG RVP 300 Diffusion Furnace and Accessories is a reliable and versatile machine that offers a wide range of features to facilitate various thermal processes. It is an ideal solution for professional laboratories needing a reliable and accurate diffusion furnace and accessories.
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