used SVG / THERMCO / AVIZA VTR 7000+ for sale

This SVG / THERMCO / AVIZA VTR 7000+ has been sold.

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ID#: 9078991 Manufacturer: SVG / THERMCO / AVIZA Model: VTR 7000+ Category: DIFFUSION FURNACES & ACCESSORIES Vintage: 1996 Wafer Size: 8" Equipment Details: Vertical LPCVD furnace, 8"
(5) Vertical heating zones
Dual axis
SMIF: no
Loadlock: <10 ppm

Gas Process:
1 N2 5L/mn 1661
4 NH3 500 cc 1260
5 NH3 1 L/mn 1260
6 DCS 100 cc 1260
9 N2/DCS 2 L/mn 1260

Hook Up:
General exhaust: GE 285.6; >800m3/h
Toxic exhaust: TE 260.7; >250m3/h
Power: KSA 630 TR6 L01

Currently warehoused
1996 vintage.
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