Used TEL / TOKYO ELECTRON Alpha 303i #101184 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

ID: 101184
Wafer Size: 12"
Vintage: 2006
LPCVD Nitride Furnace, 12" Dual FOUP WAVES Controller UP box Boat elevator with tube shutter Cassette load automation Boat rotation Gasses Dichlorsilane (DCS) NH3 N2 2006 vintage.
TEL / TOKYO ELECTRON Alpha 303i is a diffusion furnace and accompanying accessories for semiconductor manufacturing. This advanced automation tool is designed to improve semiconductor etch processes and is used in research and production facilities all over the world. TEL ALPHA-303I has the capability to rapidly heat up and cool down with precise control. It is also capable of rapid gas flow rate, temperature and pressure changes. TOKYO ELECTRON ALPHA-303 I consists of a diffusion furnace, rotating drive for rotary and linear motion, directional locks, and a controller with user interface. The diffusion furnace consists of multiple heating zones and a temperature/cooling unit. The temperature/cooling unit is a digitally controlled thermal environment that is used to precisely control the temperature of the furnace and its components. The directional locks allow the elimination of mechanical looseness and can provide more stable deep profile etching. TEL / TOKYO ELECTRON ALPHA-303 I also has a controller with user interface. This interface allows the user to enter parameters and monitor the progress of the device. For example, users can monitor the temperature, pressure, gas flow rate, and other parameters before, during, and after the etching process. Additionally, the controller has built-in safety features that ensure that the device operates in a stable, repeatable, and reproducible manner. To ensure smooth dynamic performance, TEL ALPHA 303 I also features a number of features. These features include a shuttle system for rapid heating and cooling, a helium assist capability for fast temperature changes, advanced recirculation system for uniform processed substrates, and a liquid nitrogen gun for easy nitrogen flow. This advanced diffusion furnace is designed for use in high-end equipment found in research and production facilities. With its enhanced safety features and its advanced control system, ALPHA-303I is a powerful tool for improving etching processes. This tool is suitable for a wide range of applications and is an ideal choice for improving accuracy and speed of production.
There are no reviews yet