Used TEL / TOKYO ELECTRON Alpha 8S #180604 for sale

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ID: 180604
Wafer Size: 8"
Vintage: 1998
LPCVD TEOS furnace, 8" Installed 1998 vintage.
TEL / TOKYO ELECTRON Alpha 8S is an advanced high-temperature diffusion furnace and integrated accessories. The furnace is designed for precision PECVD processing of samples used in the semiconductor, MEMS and other microelectronics industries. It runs on a reliable, easy-to-operate platform and is capable of process temperatures up to 1250°C. TEL ALPHA-8S impresses with advanced high-temperature diffusion performance and unparalleled flexibility. The intuitive graphical user interface enables users to customize the advanced process parameters or set up extreme recipes in record time. The dual RF sources unit is also highly adaptable and can easily be adjusted to support advanced processes such as amorphous silicon deposition. TOKYO ELECTRON ALPHA 8 S furnace is capable of processing a wide variety of wafers and substrates, making it perfect for prototyping and production. While other furnaces may require extensive maintenance, Alpha 8S is low-cost with virtually zero preventive maintenance required. The process chamber features advanced cooling features, making it safe and easy to handle the consistently high process temperatures. TEL ALPHA 8 S comes equipped with all the necessary accessories for optimized operation, such as a near-infrared quartz heater, an efficient cooling system, and advanced power supply systems. All of these components are integrated for optimal performance and convenience. The integrated components allow for fast and easy access, meaning minimal setup times and improved throughput. TEL Alpha 8S also features advanced safety systems such as extreme temperature sensors, O2 and H2 gas detectors, and pressure sensors. These allow operators to quickly identify any potential issues, allowing for rapid intervention and improved process control. In summary, TOKYO ELECTRON Alpha 8S is a high-performance, secure and dependable diffusion furnace that is perfect for prototyping and production in the semiconductor, MEMS and other microelectronics industries. The aesthetics, processing capability, and advanced yet simple-to-operate platform make it perfect for any production environment.
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