Used TEL / TOKYO ELECTRON Alpha 8SE #9047511 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

TEL / TOKYO ELECTRON Alpha 8SE
Sold
ID: 9047511
AVAFGN Furnace.
TEL / TOKYO ELECTRON Alpha 8SE is a state-of-the-art diffusion furnace and its associated accessories used in the process of fabricating semiconductor integrated circuits. TEL ALPHA-8SE is a single-wafer batch-type diffusion furnace with a maximum process temperature of 1000°C and features a low-standing-wave plasma-enhanced CVD (Chemical Vapor Deposition) process for superior uniformity and device performance. TOKYO ELECTRON ALPHA-8 SE is a closed cylindrical alloy chamber that can be operated in three distinct modes—thermal oxidation, thermal nitridation, and chemical vapor deposition (CVD). Each mode is controlled by a comprehensive set of parameters including gas pressure, temperature, and flow rates. TEL / TOKYO ELECTRON ALPHA 8 SE has a unique feature called Dual Angle-Cycle Process Control which allows the user to interchange between different angles throughout the process cycle, allowing for more uniform layers-on-wafer performance. ALPHA-8SE utilizes both a low-temperature molybdenum susceptor and a high-temperature quartz susceptor. The molybdenum susceptor is used for short process cycles and is designed for excellent uniformity and low background distortion. The high-temperature quartz susceptor is used for long process cycles and can safely accommodate temperatures of up to 1000°C. ALPHA-8 SE is equipped with a number of safety features including an automatic shutoff system to prevent overheating, humidity sensors to detect water vapor, and pressure sensors to detect low process pressure. It is also equipped with state-of-the-art particle filtering and scrubbing systems for superior environmental protection. To ensure optimum performance and reliability, ALPHA 8 SE is equipped with a comprehensive system of temperature controllers that include two localized process temperature controllers, two cryogenic blower controllers, and two blower speed controllers. This allows users to independently monitor and control different areas of the furnace. The furnace is also equipped with two halogen lamps that provide superior uniformity and excellent particle performance. TEL ALPHA 8 SE is a comprehensive solution for semiconductor processing needs, providing users with superior performance, reliability, and safety. Its unique features and accessories offer users outstanding thermal processing and CVD performance, ensuring excellent device performance and uniformity.
There are no reviews yet