Used TEL / TOKYO ELECTRON Alpha 808SC #9068394 for sale

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TEL / TOKYO ELECTRON Alpha 808SC
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ID: 9068394
Wafer Size: 8"
R-Poly Diffusion Furnace, 8" Non-SMIF.
TEL / TOKYO ELECTRON Alpha 808SC is a diffusion furnace and accompanying accessories designed for high throughput wafer processing needs. This model features a chamber volume of 80 liters and a maximum temperature of 1250°C. The furnace boasts top notch performance, providing wafer uniformity through steady and precise temperature control, rapid temperature recovery, and fast heating rates. The furnace has an integrated process monitor which facilitates process monitoring, and also helps to maintain environmental conditions. In addition, it features a programmable controller which is equipped with a remote control function to enable users to control the process from remote locations. The controller also has a user friendly graphical interface and a variety of peripherals can be connected to facilitate individual processing requirements. TEL Alpha 808SC also has an advanced Control Equipment Architecture (CSA) which provides an efficient, integrated control system. This unit features a simulation control mode which enables users to control their process from anywhere in the world. The machine can also manage multiple recipes, asynchronous recipes, and switch between process parameters in real time. The diffusion furnace is designed for easy installation and maintenance, and comes with an auto-cleaning tool to reduce maintenance time. The asset is also equipped with an integrated loadlock to help facilitate loading and unloading of substrates. TOKYO ELECTRON ALPHA 808 SC has a CFRP (Carbon Fibre Reinforced Polymer) chamber shell which ensures that the chamber maintains its shape even when exposed to high temperatures. TEL / TOKYO ELECTRON ALPHA 808 SC is designed with advanced safety features which ensure process reliability and safety. The model has an automated cooling equipment to reduce the risk of potential dangers and provides a range of process protection systems to ensure process integrity. Additionally, TEL ALPHA 808 SC is customizable. With optional accessories, the system can be upgraded for specialized processing needs. These accessories include additional load locks, quartz enclosures, QCM sensors, and quartz wafer carriers / vacuum sources. The unit can also be integrated with other TEL systems to provide customers with a complete wafer processing solution.
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