Used TEL / TOKYO ELECTRON Alpha 808SE #9050117 for sale

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TEL / TOKYO ELECTRON Alpha 808SE
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ID: 9050117
Wafer Size: 8"
Diffusion furnace, 8".
TEL / TOKYO ELECTRON Alpha 808SE is a diffusion furnace and accessory designed to enable process flexibility while providing a high degree of repetitiveness and accuracy in substrate processing. TEL Alpha 808SE consists of a heating chamber, a reaction chamber, and several ancillary systems. The heating chamber uses two resistance-heating systems (RHS) and a pair of gas injection systems to ensure uniformly high temperature conditions within the chamber. The RHS incorporates high-performance heating elements that are capable of producing temperatures up to 1000 degrees centigrade with a very low temperature gradient. This is further enhanced by gas injection, which is routed to the nozzle and then injected into the reaction chamber which mixes the deposited gas and furnace ambience to produce the desired process atmosphere. The heat is emitted from the heating chamber and monitored by special sensors in the reaction chamber. Additionally, this chamber is equipped with an inert environment monitor (IEM) equipment to maintain the high quality of the working environment. The reaction chamber also includes a pressure-controlled flow system that stabilizes the atmosphere within the chamber, enabling faster process cycles and better control over etch parameters. Furthermore, the flow unit is paired with an exhaust machine to ensure particulate-free atmosphere. TOKYO ELECTRON Alpha 808SE offers efficient substrate processing through high-precision displacement systems which include a robotic substrate transfer arm, and a seven-axis robot arm. These are controlled by an advanced control and monitoring tool and can be used to precisely control the entire asset. Finally, Alpha 808SE comes with several optional accessories including a component delivery model for material handling, temperature controllers, and data loggers to allow users to record and monitor equipment temperatures, pressure, and other parameters. TEL / TOKYO ELECTRON Alpha 808SE diffusion furnace is a reliable tool for substrate processing with its high temperatures, uniform temperature distribution, and wide range of motion control options.
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