Used TEL / TOKYO ELECTRON Alpha 8S / 808SC #111907 for sale

TEL / TOKYO ELECTRON Alpha 8S / 808SC is a state-of-the-art diffusion furnace and accessory that is designed for the deposition of thin films onto semiconductor wafers. This equipment is capable of providing superior uniformity and uniform temperature across wafers up to 8-inches in diameter. TEL Alpha 8S / 808SC features an advanced 8-zone immersion type quartz-tube diffusion furnace with a maximum temperature of 1,200°C. It is also equipped with an advanced cleaning system designed to remove all types of contaminants from wafers prior to deposition. The unit utilizes a combination of isotropic and anisotropic etching techniques to remove particles, metals, and organic contaminants. TOKYO ELECTRON Alpha 8S / 808SC also includes a variety of accessories, such as two loading robots to facilitate wafer loading, a temperature sensor port (TSP) to ensure precision temperature control, and a built-in mass flow controller (MFC) to manage and precisely control the flow of gases. The machine also includes a load lock tool to prevent contamination and conserve process gases. Alpha 8S / 808SC is designed specifically for fine-pattern deposition processes and is capable of depositing films with thicknesses ranging from 50 nm to 500 nm. It is designed for low-temperature, low-pressure deposition, so it is capable of depositing films without compromising precision. The asset is also rated for high-productivity, making it suitable for mass production. Additionally, TEL / TOKYO ELECTRON Alpha 8S / 808SC is equipped with warning/alert functions and a graphical user interface (GUI) to facilitate efficient operation and provide real-time information on process parameters. This user-friendly GUI also helps to keep the model running safely and efficiently. Overall, TEL Alpha 8S / 808SC is an advanced diffusion furnace and accessory that is designed to provide superior performance and distinct advantages over other systems. The advanced 8-zone quartz-tube furnace, advanced cleaning equipment, temperature sensor port, mass flow controller, load lock system, and user-friendly GUI ensure, reliable and consistent deposition results and greater production efficiency.