This TEL / TOKYO ELECTRON ALPHA 8S has been sold.

Check our Similar Products below, use our Search feature to find more products available for sale or contact us with any questions you might have.
ID#: 104721 Manufacturer: TEL / TOKYO ELECTRON Model: ALPHA 8S Category: DIFFUSION FURNACES & ACCESSORIES Equipment Details: High-temp furnace, 8"
Process: Oxide
8 cassette stockers
Frequency 60 Interface.-Cassette ¡V 8"-Phase -3 Voltage, 208V
Facilities entry at bottom
Wide Body style, Right sided
Brooks 5964 MFCs
MFC 7 HCl 1 slm
MFC 6 O2 1 slm
MFC 5 O2 20 slm
MFC 4 H2 10 slm
MFC 3 Ar 20 slm
MFC 2 N2 5 slm
MFC 1 N2 20 slm
TS-4000SZ Furnace controller
Varian TEL LR300 Temperature controller
AP Tech O2 and H2 flow switches
HEL Pyro Control
Touch screen operator interface
Load Size 100 wafers-(upgradeable 150)
1200 C Heater Core
Lip Seal, Inner T/C, Linear aligner UP/DOWWN axis slide motions
No variable pitch. Single or five (5) wafers
Boat, CLN ON 07-00202
Cover, Pedestal 07-00204
Pedestal 07-00205
PFA tube (6.35x4.35x1.0T) 06-22014-00-16 inch process Tube
Rapid Cooling
System power rating: 3 Phase, 208 V, 60 Hz
1994 vintage.
[+] Read more [-] Close

Thank You for submitting your information. We will be contacting you shortly regarding your equipment.


Sending message...

Please enter your contact information and a member of CAE’s sales team will reach out to you to discuss the equipment.

* Required Field