used TEL / TOKYO ELECTRON ALPHA 8S for sale

This TEL / TOKYO ELECTRON ALPHA 8S has been sold.

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ID#: 119701 Manufacturer: TEL / TOKYO ELECTRON Model: ALPHA 8S Category: DIFFUSION FURNACES & ACCESSORIES Vintage: 1997 Equipment Details: Vertical diffusion furnace Currently Configured for Nitride with 8" Notched Wafers 1+5 Wafer Type Integrated Open Cassette Loaders Load Lock System: Yes TS-4000 System Controller Temp. Controller Model M-121 Unit 1660 MFC Controller TEL Model VMM-40-101 Heater Boat Rotation – Inspection needed Signal Tower (Red, Amber, Green) Gas Detector: No Quartz Parts: Outer/Inner Tube, Boat, Pedestal, Fin, Manifold, Shutter, and Cap Covers, One Injector and T/C Port Cover Gas System N2 NH3 SiH2CI2 N2O 1997 vintage As-is, where-is.
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