Used TEL / TOKYO ELECTRON Alpha 8S #119701 for sale
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ID: 119701
Vintage: 1997
Vertical diffusion furnace
Currently Configured for Nitride with 8" Notched Wafers
1+5 Wafer Type
Integrated Open Cassette Loaders
Load Lock System: Yes
TS-4000 System Controller
Temp. Controller Model M-121
Unit 1660 MFC Controller
TEL Model VMM-40-101 Heater
Boat Rotation – Inspection needed
Signal Tower (Red, Amber, Green)
Gas Detector: No
Quartz Parts: Outer/Inner Tube, Boat, Pedestal, Fin, Manifold, Shutter, and Cap Covers, One Injector and T/C Port Cover
Gas System
N2
NH3
SiH2CI2
N2O
1997 vintage
As-is, where-is.
TEL / TOKYO ELECTRON Alpha 8S is a diffusion furnace and accessory designed for use in semiconductor manufacturing. This highly sophisticated piece of equipment is capable of providing both rapid heating and cooling, while meeting the highest standards of accuracy and precision in deposition and etching processes. TEL ALPHA-8S is constructed with a graphite-based pedestal and features a built-in cooling equipment and air blowing device for temperature control during high-temperature processes. It also includes a proprietary TEL-developed Quick-heating Induction Coil that offers a fast heating rate of 500°C/second, which eliminates the need for separate heating elements. An additional nitrogen-gas purification system provides an additional layer of process security by removing oxygen for precise reactive processes. TOKYO ELECTRON ALPHA 8 S also includes a variety of customizable options to accommodate specific user needs. These include a wafer holders that can be adjusted to different sizes and shapes, as well as a highly efficient plasma monitoring and control unit. ALPHA-8S also includes a range of temperature sensors and an intelligent software to ensure precise temperature regulation. It is also capable of managing different gas flows, providing precise control of the etching process. TOKYO ELECTRON ALPHA-8 S is an ideal choice for precise and high-temperature processes such as advanced semiconductor technologies, including FD-SOI, FinFET, 3D-NAND, memory, and display film applications. It is also used extensively in the fabrication of flat panel display panels, thin films, and MEMS devices. As such, TEL ALPHA 8 S provides unbeatable accuracy and reliability across a wide range of manufacturing applications. In sum, TEL Alpha 8S diffusion furnace and accessory is a high-performance, reliable, and customizable solution for precise and high-temperature deposition and etching processes. With its advanced design, built-in cooling machine, and customizable options, TEL / TOKYO ELECTRON ALPHA-8S is a powerful and versatile piece of equipment for a wide range of semiconductor and related applications.
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