Used TEL / TOKYO ELECTRON Alpha 8S #122684 for sale

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ID: 122684
LPCVD TEOS furnace, 8", 2000 vintage.
TEL / TOKYO ELECTRON Alpha 8S is a diffusion furnace and accessorie that is used in the fabrication process for semiconductor and related products. This furnace is specifically designed for advanced annealing of materials such as silicon and germanium. This product is a key element in enabling semiconductor manufacturers to meet the ever-increasing demands for higher production yields and better device performance from their consumers. TEL ALPHA-8S is a multi-zone furnace which features a large number of independent heating elements, up to 8. Each element is capable of reaching temperatures up to 2000°C. It also boasts a very large heating capacity, up to 1000kW. With this type of power, the furnace is able to quickly reach high temperatures. This high power output is also accompanied by a low power consumption of only a few kW. Due to its independent temperature control and advanced thermal management system, TOKYO ELECTRON ALPHA 8 S can be used for processes such as epitaxial deposition, diffusion, high temperature annealing and doping. TEL / TOKYO ELECTRON ALPHA-8 S also features several safety measures, allowing for process integrity and protection from potential hazards. One of these is a built-in alarm system which alerts the user if any material within the furnace has reached a critical temperature. The furnace is also equipped with a cooling system which ensures that the furnace temperature remains within safe limits, even when under high pressure. ALPHA 8 S is capable of controlling the pressure inside the chamber through the use of pressure sensors, making the entire process more efficient. In addition, Alpha 8S can be used for several other processes including rapid thermal processing, nitriding, and oxidation. This furnace is also compatible with several other devices such as photomask aligners, wafer inspection systems and metrology systems. TOKYO ELECTRON Alpha 8S is a reliable and versatile piece of equipment that can be used by companies of all sizes that are looking to produce high-quality devices in the semiconductor industry.
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