used TEL / TOKYO ELECTRON ALPHA 8S for sale

This TEL / TOKYO ELECTRON ALPHA 8S has been sold.

Check our Similar Products below, use our Search feature to find more products available for sale or contact us with any questions you might have.
ID#: 62757 Manufacturer: TEL / TOKYO ELECTRON Model: ALPHA 8S Category: DIFFUSION FURNACES & ACCESSORIES Vintage: 1997 Wafer Size: 8" Equipment Details: Diffusion doped poly furnaces, 8" LPCVD Phosphorus Doped Poly process configuration 150 production wafer load size TS4000Z system controller 440 V power requirement Boat rotation Tape heater and associated control Remote gas detection Exhaust monitors Tylan General throttle control Ulvac GP-2ARY vacuum monitor Gas System UHP N2 2x N2 10%Ph3/He SiH4 ClF3 1997 vintage.
[+] Read more [-] Close
Price

Thank You for submitting your information. We will be contacting you shortly regarding your equipment.

loading

Sending message...

Please enter your contact information and a member of CAE’s sales team will reach out to you to discuss the equipment.

* Required Field