Used TEL / TOKYO ELECTRON Alpha 8SE-Z #115121 for sale

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ID: 115121
Wafer Size: 8"
Vintage: 2000
Vertical Anneal Furnace, 8" Model: A8SE-ZAR Process : LT Forming Gas (H2 Anneal - Reflow -Beol) Standalone Furnace with Tunnel Layout and Non Shared Gas Cabinet 2 Loader Ports NON-SMIF Low Temp Heating Element 5 Zone Heater Type : VMM-40-104 Waves Controller AERA MFC's N2 Loadlocks No Boat Rotation Wafer Capacity - 170 Total, 150 for Production run 208VAC 50/60hz 3 Phase Wiring 2000 vintage.
TEL / TOKYO ELECTRON Alpha 8SE-Z is a diffusion furnace, which is primarily used to create and manipulate solid-state devices. This specially designed furnace is used to process and control materials, such as semiconductors, at a high temperature and pressure. TEL ALPHA 8SEZ has a temperature range of up to 2000°C and pressure range up to 10 torr. The design of this diffusion furnace features a sample/wafer chuck made of stainless steel, molybdenum, and silicon carbide, which are all materials known for their thermal stability, allowing for precise temperature control. This model diffusion furnace also includes specialty accessories, such as a special cooling equipment that can reduce the temperature of the furnace with precision. The furnace itself is capable of rapidly and accurately adapting to various procedures, which enables it to accurately profile the parameters for heat treatments. The temperature is constantly monitored and maintained with a PID temperature controller. It is possible to program the temperature profile for up to two processes in multiple segments including ramp and soak, allowing for repeatable and precise thermal processes. TOKYO ELECTRON ALPHA-8SE-Z also includes an active cassette lift system that allows samples/wafers to be loaded and unloaded quickly and conveniently. Its design also allows for a uniform substrate surface temperature, which is essential for achieving accurate and precise heat treatments in the semiconductor industry. The furnace uses a direct-drive, self-cooled motor, which is capable of providing uninterrupted, precise control of the power supply to the susceptor. Alpha 8SE-Z is also extremely safe due to its design. There is an automated safety lock on the doors, while filtration systems ensure that hazardous gasses, such as fluorine and chlorine, are not emitted. The furnace also features an intelligent program monitor, where unit conditions are actively monitored to detect any issues that may arise during operation. Additionally, each generator can be controlled from its own panel, allowing for quick and efficient machine adjustments. TEL / TOKYO ELECTRON ALPHA 8 SE Z is a state-of-the-art diffusion furnace that offers a high degree of accuracy and reliability for processing and controlling materials. Its temperature range, pressure range and safety features make it an ideal tool for a broad range of applications in the semiconductor industry.
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