Used TEL / TOKYO ELECTRON Alpha 8SE ZABFNS #9003694 for sale

TEL / TOKYO ELECTRON Alpha 8SE ZABFNS is a diffusion furnace and accessories package designed for high throughput annealing of advanced semiconductor wafers. It features a 8-bay vertical furnace, a substrate transfer equipment, and a suite of control software. The 8-bay vertical furnace on TEL Alpha 8SE ZABFNS is a high-temperature, precision annealing device with a rated temperature range of 600°C to 1300°C. It includes dual-level halogen lamps with the capacity to increase the temperature up to 200°C within seven seconds, enabling annealing times of only 6 minutes. It also features a number of gasflow control systems, from a seven-point pressure calibration regulator to a diffusion cell mass flow controller, widely used in plasma-enhanced annealing. TOKYO ELECTRON Alpha 8SE ZABFNS's substrate transfer system allows users to achieve precise results at high speeds. The unit includes an innovative linear delivery machine comprised of two main modules: the loader and unloader. The loader provides instant operational efficiency and flexibility by allowing 8-inch wafers to be quickly loaded and unloaded between processing steps. The unloader improves speed and throughput with the help of a unique tilted chuck transfer tool and a fully automated wafer cart. The control software of Alpha 8SE ZABFNS is designed to maximize user efficiency and accuracy by allowing users to remotely monitor process data, access asset information, and permit manual control of model operations. Highly advanced analysis and reporting features are available through the software, including an integrated recipe database for creating, saving, and executing standard process runs. In summation, TEL / TOKYO ELECTRON Alpha 8SE ZABFNS is an advanced and reliable diffusion furnace equipment optimized for high throughput annealing of semiconductor wafers. It features a 8-bay vertical furnace, a substrate transfer system, and powerful control software for maximum efficiency and accuracy.