Used TEL / TOKYO ELECTRON Alpha 8SE #144024 for sale
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ID: 144024
TiN Furnace, 8"
System configuration:
(Qty.)System Hand LL
System Paint Color White
Furnace Front Surface Finish Painted
Process Pressure 500 mTorr
Process Temperature ( C ) 800C
FTP Heater Installed
Rapid Cooling Unit Installed
Heater Type FTP VOS-40-017 (RT)-1000C
N2 Purge System Installed
02 Densimeter Model NGK SH-302
SMIF Not Installed
SMIF POD (maker/model) N/A
SMIF OEM Probe (maker/model) N/A
AGV Compatibility Not Installed
Process Gasses
Process Gas 1 Pure N2
Process Gas 2 NH3
Process Gas 3 H2
Process Gas 4 ClF3
Process Gas 5 TiCl4
Gas Distribution System
Basic Style Integrated Gas System Rail Type (Fujikin)
Tubing Material Stainless Steel
Tubing Finish Electro-polish
Manual Valve FUJIKIN
Air-Operated Valve FUJIKIN
Filter Millipore
Regulator Veriflo
MFC STEC SEC-7350 (Analog)
Press. Transducer Veriflo
Press. Transducer Display Reference Compound
External Torch Unit N/A
Baking System - Burn Out Unit Not Installed
Vaporizer N/A
Liquid Source Auto-Refill N/A
Auto-Refill Provided By N/A
Auto-Refill Tubing Interconnect By N/A
Auto-Refill Power Provided By N/A
Gas System Schem. Dwg/Parts List 2109-323548-13
Panel Heater for Furnace Opening N/A
Vacuum System:
Vacuum Pressure Controller CKD-VEC
Trap Not Installed
Pump-FNC Vac Tubing Provided By Customer
Manifold Heater Not Installed
Water/Cassette Handling
Wafer Type 200mm SEMI STD - Notched
Wafer Notch/Flat Aligner Installed
Cassette Type
Cassette-Number of Wafers 25
Cassette Storage Qty. 21
Monitor Cassette Operation
Cassette In-Out Sequence
Transfer-stage Protrusion Sensor Installed
Fork Type/Material 1+4
For-Wafer Presence Sensor Installed
Fork-Wafer Position Sensor or Guide Not Installed
Fork-Variable Pitch Installed
Boat/Pedestal
Boat Rotation Installed
Cap Heater Installed
System Controls
System Controller WAVES
Remote MMI and Gas Flowchart Not Installed
Signal Tower/Colors Red/Yellow/Green
Signal Tower Location(s)) FNC Front
General Pressure Display Units PSI
Cabinet Exhaust Display Units Pa
Temperature Control
Furnace Temperature Controller M-560A
Gas Leak Detection
Gas Detection Provided By TEL
Gas Detection System Maker Riken
Gas 1 Detected/Point H2 U/Box
Gas 2 Detected/Point NH3 U/Box
Gas 3 Detected/Point ClF3 U/Box
Customer I/F Ctrl. Handshakes
Other Options and Specials Not Installed
Bar Code Reader (maker/model Not Installed
Other Options and Specials
Bar Code Reader (maker/model Not Installed
Chemical Pre-filter Not Installed
Rapid Ionizer (maker/model) Not Installed
Equipment Layout & Facilities
Furnace Exhaust Connection Point Top Connection
Cooling Water Connection Point Bottom Connection
Incoming Gas Connection Point Top Connection
Gas Unit Exh. Connection Point Top Connection
Facility Elect. - Equip. Per Input
Voltage 3phase 480V
Voltage1phase 120V
Ctrl Pwr UPS make/model No UPS
UPS Input Voltage/Output Voltage N/A
Step Down Transformer (Outside) 480V In 100V/200V Out
2003 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is a diffusion furnace and accessory used for precise thermal treatment of semiconductor substrates. It is especially used for source/drain development and anneal purpose. The furnace is made with TEL advanced linear-type high-efficiency heating process, allowing for precise temperature control with excellent uniformity and temperature response. TEL ALPHA-8SE diffusion furnace is equipped with a high quality multi-channel transport system, and has a large capacity for loading multiple substrates. The process chamber is capable of both standard atmosphere and vacuum processing, as well as atmosphere control via an optional in-situ gas injector. The high temperature range of TOKYO ELECTRON ALPHA-8 SE allows for a wide range of process requirements, and the dual zone design allows for precise control of temperature and atmosphere optimization. ALPHA 8 S E also comes with advanced digital control systems, giving precise and reliable control over process parameters, such as temperatures, pressure, and emergency stop settings. Furthermore, Auto-Observe feature as standard allows users to monitor process parameters and adjust in-situ during the process in order to optimize the uniformity. The process monitor also captures historical process data that can be used for statistical process control (SPC) and analysis. In addition, TEL Alpha 8SE is equipped with standard safety features, both physical and electronic. The safety interlock prevents operators from entering the furnace and the transfer system, and provides emergency stop in case of abnormal situations. Other protective equipment includes the air filtering system, which keeps the process chamber safe from pressurizing, and the heat-resistant rubber coating, which provides thermal insulation for the chamber doors. Overall, TEL / TOKYO ELECTRON ALPHA 8S-E diffusion furnace and accessories are an excellent choice for advanced thermal processes. It provides a wide range of capabilities, from basic process standardization to full automation, and ensures safety and process reliability. The advanced blanket solution helps improve process uniformity while the digital control systems simplify data acquisition and analysis. All these features and benefits make TOKYO ELECTRON ALPHA 8S-E a powerful, versatile and reliable tool.
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