Used TEL / TOKYO ELECTRON Alpha 8SE #62753 for sale
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ID: 62753
Wafer Size: 8"
Vintage: 2007
Vertical furnaces, 8"
SOD (di-electric) cure / low temp Anneal process configuration
Alpha 8SE-Z (ABF)
125 production wafer processing size
WAVES system controller (V3.23 R001)
M-560 Temp controller
5 zone heater element
400 degree C processing temperature
Rear remote
Has TEL deinstall inspection documentation
Gas system
Pure N21
Pure N22
O2
H2
Schumacher Absolute TCA bubbler
2007 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is an advanced diffusion furnace and accessories package designed to deliver superior fabrication performance. This equipment consists of a furnace body, bellows pump for vacuum control, load lock chamber for processing substrates, and a variety of other automated features. TEL ALPHA-8SE is designed for advanced thermal processing applications such as semiconductor, MEMS, and optoelectronic device fabrication. TOKYO ELECTRON ALPHA-8 SE furnace features high temperature uniformity and excellent temperature accuracy, allowing for precise processing times and superior control over temperature profiles. The temperature control is achievable by utilizing a temperature control system that combines a separation temperature control mechanism and a ramp-up temperature control unit. This ensures a high degree of precision in all temperature ranges. The furnace body of TEL / TOKYO ELECTRON ALPHA-8SE consists of an embedded multi-zone heating machine which allow substrates to be heated in various zones sub-divided into uniform cooling and heating units. This results in more uniform temperature control even when the substrate size and shape change due to high temperature difference. The inner furnaces are made of high-temperature resistant stainless steel and titanium alloy components, ensuring durability in high temperature environments. To ensure a safe, uniform process environment, TEL / TOKYO ELECTRON ALPHA 8 SE is equipped with a range of proprietary automated features such as a thermal conductivity monitor and active pollutant control. The thermal conductivity monitor helps ensure uniform substrate temperature by regulating the temperature of the inner and outer walls of the furnace chamber as necessary. The active pollutant control tool maintains cleanliness and low levels of process-generated particulates in the processing chamber, ensuring safe, stable process conditions. In addition to these automated features, TEL ALPHA 8 SE offers a variety of useful accessorie options. Such items include tool handling devices and wafer transfer systems, both of which help streamline substrate handling. TOKYO ELECTRON Alpha 8SE also includes a particle analysis / filteration asset for collecting and analyzing process particles, enabling operators to maintain precise process control. Overall, ALPHA-8 SE is a highly advanced diffusion furnace and accessorie package that offers superior fabrication performance and efficient process automation capabilities. This model is well suited for both traditional semiconductor fabrication and progressive membrane and optoelectronics device fabrication processes.
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