Used TEL / TOKYO ELECTRON Alpha 8SE #9083654 for sale

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TEL / TOKYO ELECTRON Alpha 8SE
Sold
ID: 9083654
Vintage: 1999
Diffusion furnaces Process: Si, SiN, HTO 1999 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is a state-of-the-art low-temperature and low-pressure semiconductor diffusion furnace and accessory. This cutting-edge equipment is designed to allow for accurate, reproducible deposition rates backed with monitoring and control of the critical process parameters. With a wide working pressure up to 1.33 Pa, and a maximum of 200°C, TEL ALPHA-8SE allows for peaceful, temperature-controlled diffusion processes with no adverse effects on the device structure. It comprises of different components, namely a heated chamber, a susceptor (furnace bottom), and a temperature control unit. The heated chamber of the diffusion furnace is constructed from stainless steel and is equipped with quartz windows for optical contact. A graphite susceptor is included in the design to provide a uniform distribution of heat. TOKYO ELECTRON ALPHA-8 SE also features a double edge wafer chuck, which offers a wide support area to allow easy handling of fragile wafers. The temperature control unit features single zone and multi-zone cup configurations, which allow for precise temperature control at different positions in the furnace. TEL ALPHA 8 S E is further equipped with an advanced safety system that detects temperature deviations due to a breakdown, thus ensuring safe operation. ALPHA-8SE diffusion furnace also features full digital control of the deposition process parameters such as target temperature, pressure, and total pressure range. The controller ensures that the target parameters remain within the desired range for each process step, thus promoting more consistent results. Additionally, the process control unit includes data acquisition and event logging, allowing the user to easily review the process parameters. ALPHA 8 S E diffusion furnace and accessory is durable and delivers superior results, making it ideal for all kinds of semiconductor fabrication, research, and general laboratory applications. The machine is built from high-quality materials and components to promote long service life and reliable operation. ALPHA 8 SE is also equipped with a wide range of additional features such as gate valve and exhaust flange control, to ensure maximum customization according to customer requirements.
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