Used TEL / TOKYO ELECTRON Alpha 8SE #9118909 for sale
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ID: 9118909
Vintage: 2004
Diffusion furnace
VAC Pump
Chiller
Vertical furnace
TEL Heater remove / install fixture
Power box
Furnace RCU
Heater VMU
Carrier: 138 wafer slots
2004 vintage.
TEL / TOKYO ELECTRON Alpha 8SE is a diffusion furnace and accessory package for specialized semiconductor processing. This diffusion furnace utilizes advanced control and monitoring systems to precisely maintain operating temperature and chamber pressure during semiconductor processing. TEL ALPHA-8SE is designed to operate in a two-zone heat-up chamber, providing uniform thermal characteristics and excellent performance. The vacuum chamber is manufactured from 304 stainless steel and offers an exposure chamber of 350mm. TOKYO ELECTRON ALPHA-8 SE uses a nitrogen/argon/hydrogen-based atmosphere to reduce nucleation and fragmentation of the semiconductor material, ensuring quality results. The diffusion process is monitored by the included diffuse Reticle Image Monitoring System, which measures performance in real-time. This system provides an exact analysis of film properties of the silicon wafers during exposure, making TEL / TOKYO ELECTRON ALPHA 8 S E one of the most accurate equipment for semiconductor processing. TEL / TOKYO ELECTRON ALPHA 8 SE features a thermal control system that is programmable to allow manual control or full automation. The temperature can be precisely regulated from 0-1100°C, providing controlled thermal flux and diffusion rates for efficient, consistent performance. A vacuum view-port window is provided for monitoring of the process. TOKYO ELECTRON Alpha 8SE includes several features to ensure safe, consistent operation, including simplified maintenance and cleanup of components. A throttle valve, built from stainless steel, is included to protect the valve from high-temperature exposure and oxidation. TEL ALPHA-8 SE also offers optional scrubbers to reduce the amount of contaminants entering the furnace. TEL ALPHA 8S-E is a reliable and precision-engineered diffusion furnace, essential for advanced semiconductor packages. Combining automation, advanced temperature control and monitoring, ALPHA-8 SE produces consistent results with excellent quality.
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