Used TEL / TOKYO ELECTRON Alpha 8SE #93399 for sale

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ID: 93399
Wafer Size: 8"
Vintage: 2004
Nitride LPCVD furnace, 8" 170 wafer slots Tool Specific Information: Heater Part No: VMM-40-101 Software Version: Ver3.11 R005 WAVE System Power Rating: 110AC One Phase / 208 AC Loading Configuration: 6 Loader Main System: WAVES Controller Photohelic Gauge Boat Elevator Wafer Load Automation 21 Cassette Stocker Temperature Controller (M560) Furnace Monitor, Power Control Unit Remote Utility&Gas Cabinet Inner T/C for Ration Mix Auto Shutter Gas System (NH3, DCS) Options: Signal Tower Pitch Change Mechanism UPS GEM Communication N2 Load Lock Ambient Control: Quartz ware Load size 170 wafers Load lock purge system Process gas: NH3, DCS Gas Type - Convention Gas System Tubing material - Stainless steel Tubing Finish - Electro-polish Manual valve - FUJIKIN Fitting Type - VCR/UJR Air-Operated valve - FUJIKIN Filter - MILLIPORE Regulator - VERIFLO MFC - AERA Pressure transducer - MILLIPORE or NAGANO Remote Components: Utility Box Power Rating: 110/208AC Pump Power Rating: 208AC-3 (Not Included) UPS Power Rating: 110AC-1 MFCs Summary MFC_NB (N2) 10sLm MFC_NR (Pure-N2) 50sccm MFC_NX (Pure-N2) 20sLm MFC_NY1 (Pure-N2) 200sccm MFC_NY2 (Pure-N2) 200sccm MFC_N1 (Pure-N2) 5sLm MFC_N2 (Pure-N2) 5sLm MFC_M1 (NH3) 2sLm MFC_D1 (SiH2Cl2) 200sccm MFM_M1 (Pure-N2) 2sLm MFM_D1 (Pure-N2) 200sccm Packing List: Power-Box UPS Main-Body Gas-Box Heater O2 Analyzer Vacuum Exhaust Pipe Cables Top Heater Frame Filter Fan Gas-Box Door EXT IN Unit Gas-Box Exhaust Support Backend Pipings Scavenger Flexible Duct Accessories 2 white boxes + 1 wafer container N2-LL Pipings Tray (Qty 3) Cable Trays Loading Area Cover Backend Support/ Cover (Qty 5) Heater Panels Main-Valve Crated in a warehouse 2004 vintage.
TEL / TOKYO ELECTRON Alpha 8SE diffusion furnace and accessories is an industrial-grade heating equipment and accessory package specifically designed for semiconductor laboratories. This diffusion furnace and its components offer an affordable and reliable solution for higher-temperature semiconductor processing, including dopant removal, annealing, and substrate deposition. TEL ALPHA-8SE system is equipped with an 8-inch loadlock chamber, allowing for a fast and consistent pre- and post-process loading of the furnace. It also comes equipped with a quartzware carrier, loadware carrier, and a substrate loader for maximum convenience. The built-in cooling fan helps to maintain a consistent temperature, ensuring reliable and consistent performance from process to process. TOKYO ELECTRON ALPHA-8 SE can process wafers up to 8 inches in diameter, making it perfect for semiconductor laboratories of all sizes. The built-in active closed-loop temperature control ensures accuracy, flexibility, and repeatability. The unit also features a menu-controlled software program that simplifies programming and ensures consistent results. TEL ALPHA 8S-E diffusion furnace and its accessories are made of high-quality materials, ensuring compatibility with a variety of semiconductor materials and deposition processes. Silicon, gallium arsenide, and diamond templates can all be processed in the machine. Its robust construction and design also make it robust and reliable in the toughest of laboratory environments. In any semiconductor laboratory, consistent quality is essential for reliable results. With TEL Alpha 8SE diffusion furnace and its accessories, users can achieve impressive and repeatable results, both in terms of quality and throughput capabilities. It offers a simple, straightforward solution to meet stringent semiconductor processing demands.
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