Used TEL / TOKYO ELECTRON VDF-615S #168017 for sale

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TEL / TOKYO ELECTRON VDF-615S
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ID: 168017
Furnace, F-Poly.
TEL VFD 615S is a diffusion furnace and accessories designed to meet the needs of research and manufacturing applications. It is an air-cooled vertical, continuous-belt furnace with a variable-speed, top and bottom heat zone which provides uniform heat-zone distribution. The upper and lower heat zones are independently adjustable and the catalytic oxidizing feature allows for precise temperature control. This allows for precise temperature control and precise control of other process parameters. The VFD615S features a stainless steel chamber with a volume of 5.4 liters, two horizontal seal bands for sealing the chamber, and two top and bottom heat zone sections to allow for precise heat zone control. It also features an integrated screen-printed glass substrate heating zone and robust catalyst-oxidizing zones, ensuring uniform temperature distribution. TOKYO ELECTRON VFD 615S also comes with a programmable logic controller (PLC) that offers flexibility and precise regulation of growth parameters. It is equipped with a data acquisition system (DAS) with one-point calibration that provides precise control of uniform temperature distribution. The variable frequency drive allows for precise speed control to help optimize process repeatability and cycle times. The VFD615S is designed for process monitoring which allows enabling or disabling heat zone operation. It offers precise control of temperature, gas flow, cell growth and removal with two independent, alternately operating, dual-directional horizontal seal bands that provide flexibility in manufacturing applications. The integrated Glass Substrate Transfer System and Overlay Alignment System (OAS) make it perfect for achieving precise substrate alignment and tight control of thermal effects. In addition, the VFD615S is equipped with an open architecture suitable for controlling up to four feed-gas lines. The insulated chamber and fan-cooled interior minimize energy consumption, minimize carbon dioxide emissions and contribute to lower operating costs. Finally, it offers integration into automated production lines with its compatible access door and advanced monitoring systems.
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