Used TEL / TOKYO ELECTRON VCF-615 #108347 for sale

TEL / TOKYO ELECTRON VCF-615 is a type of diffusion furnace used to create lithographic film masks. It can be used to successfully produce high-resolution films of various thicknesses and sizes. TEL VCF-615 is specifically equipped with a fast heating pad, hot-wall-type electric resistance heating and a high-temperature controlled environment. Its chamber is constructed of stainless steel, minimizing heat loss and radiation. Furthermore, its upper and lower susceptors are made up of quartz substrates and therefore maximize heat transfer. This diffusion furnace operates in three distinct modes, namely single-stage, two stage (front-and-back) and three-stage temperature control. In single-stage mode, the maximum temperature is regulated between 500 - 625℃ and the furnace runs at a single temperature step. During two-stage temperature control, each of the two susceptors is controlled independently, allowing for a higher degree of temperature stability. Finally, three-stage temperature control allows for the overlapping of two successive temperature steps and gives rise to extremely precise temperature control. Additionally, TOKYO ELECTRON VCF-615 also features automatic door disengagement, allowing for quick single-motion opening when transferring workpieces. VCF-615 is also equipped with several safety features. Its concentrated heat is diffused via an alumina muffle, preventing potentially hazardous thermal radiation whilst also cutting down on heat loss. Also, an emergency cooling system is incorporated in emergency cases, cooling the chamber to an appropriate temperature. Furthermore, TEL / TOKYO ELECTRON VCF-615 has an optional water cooling shroud which plays a crucial role in ensuring exceptional temperature uniformity. In conclusion, TEL VCF-615 diffusion furnace is perfect for the production of lithographic film masks with its precise temperature control, fast heating system and wide variety of safety features. It is capable of producing high-resolution films of various thicknesses and sizes which will be of great use for various applications.