Used THERMCO 4100 #9046507 for sale

THERMCO 4100 is a diffusion furnace and accessories equipment designed for annealing applications in the semiconductor industry. It is a highly efficient and reliable annealing system that utilizes a patented diffusion atmospheres and precise thermal control to produce superior results. 4100 is an atmosphere control annealing unit capable of processing both doped and undoped wafers up to the size of 150mm in diameter. This machine is ideal for efficient silicon wafer processing over a wide variety of temperature ranges from 400°C to 900°C. It features a full-range process window, including rapid thermal annealing, ion implantation annealing, blanket diffusion annealing, impinging plasma annealing, and high-vacuum annealing. THERMCO 4100 features an automated atmosphere control tool which continually monitors the chamber environment, allowing for precise control of the atmosphere. This atmospheric control ensures the appropriate composition, purity and pressure within the annealing chamber. This rapid, yet precise, temperature control is essential for controlled and repeatable annealing results. 4100 also features a 'Load-Lock' chamber which provides efficient loading and unloading of wafers without the need to vent or open the annealing chamber. This process prevents any contaminants from entering the chamber, thus ensuring the integrity of the process results. THERMCO 4100 also includes a highly accurate and reliable temperature and pressure control asset. This includes a PID temperature controller for tight temperature control and a pressure regulator for accurate end-point pressurization. It also features a built-in quartz monitor to provide real-time wafer temperature measurements and to ensure optimum thermal performance. Overall, 4100 is an ideal annealing model for the semiconductor industry due to its precise thermal control and efficient wafer processing. Its modular design allows for easy integration with any other compatible process tools. It offers superior temperature control, process uniformity and repeatability due to its user friendly programming controller. The automated atmosphere control and Load-Lock equipment ensure a clean and consistent processing environment. THERMCO 4100 is the ideal solution for achieving anexact and repeatable annealing results.