Used THERMCO 5200 #9148881 for sale

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THERMCO 5200
Sold
ID: 9148881
Tube furnaces Process: Tube 1: Wet oxide Tube 2: Wet oxide Tube 3: Upoly LP Tube 4: Upoly LP.
THERMCO 5200 is a diffusion furnace and accessory equipment specifically designed to enhance your wafer processing capabilities. With a full set of temperature, pressure and flow controls, 5200 offers a wide range of capabilities for precision wafer fabrication and other advanced microfabrication needs. THERMCO 5200 is an all-in-one system capable of both rapid heat-up and cooling down. This capability is possible thanks to its two powerful, independently controlled heating element systems. The two systems can reach an impressive top temperature of 2500°C, allowing for a wide variety of processes. Additionally, the pressure capabilities of up to 6.9 bar and the unit's superb thermal uniformity allow for an optional diffusion furnace to be integrated into the unit. At the heart of the machine is its patented tube-in-tube heating element, which combines high performance and repeatability with unequaled temperature uniformity. Its design also allows for easy, lasting connections between processes, from the main chamber to peripheral furnaces. The tool also features an active element cooling to ensure safe and repeatable performance. The unit is also equipped with a durable, air-cooled diffusion housing specifically designed to create a broad range of fluoropolymer finish improvements. This finish improvement, in turn, helps to extend the longevity of a wafer's life and performance. Multi-zone PID controls, excellent thermal and uniformity, precise pressure and flow control, outstanding temperature stability, and low maintenance requirements make 5200 the ideal choice for a variety of advanced microfabrication processes. The unit is also capable of process integration into current production systems, and its intuitive design interface makes it easy to use and configure properly. THERMCO 5200 is also backed by a reliable global service network, providing reliable and timely access to technicians who can keep your asset running smoothly and efficiently. With a competitive price and superior performance, 5200 is an ideal choice for any advanced microfabrication needs.
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