Used ALCATEL / ADIXEN / PFEIFFER AMS 4200 #9304661 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

ID: 9304661
Wafer Size: 6"
Vintage: 2007
Etcher, 6" (2) Dry etch chambers With (1) E-chuck BROOKS AUTOMATION Handler (4) Chambers Load / Unload station (4) Pumps Control units (2) Chillers PWD Cabinet / Scrubber (3) Computer consoles (2) LN2 Tanks Process chamber 1: Silicon oxide (RGV Dielectric) etch process module RIE Source reactor Substrate holder with E-Chuck, 6" Bias 600 W LF Reactor pump: ADP 122H and ATH 1600M on DN40 Throttle valve Gas lines: CF4, O2, CHF3, He Process chamber 2: Silicon etch process module ICP Plasma source Cryo temperature process Cryogenic substrate holder With mechanical clamping chuck, 6" Source: 3 kW RF Auto matching network Laser view port adapter Pumping line to pump down the substrate holder He backside cooling Bias 300 W RF LN2 Controlled cooling Dewar LN2 tank PM ADP 122 Reactor pump ATH 1600M Maglev turbo pump DN200 Heated throttle Cold trap Gas lines: SF6, O2, O2, N2 Handling platform: BROOKS AUTOMATION MX 600 Platform with MAG 7 robot 6-Sided platform: (2) Process modules (2) Cassette modules (2) BROOKS AUTOMATION VCE6 Cassette modules Electrical cabinet RF Generator PLC Breaker Control module End point detection Accessories Etch module with gas cabinet: CF4, O2, CHF3, He, Ar, N2 Etch module with gas cabinet: SF6,O2, O2,N2 BROOKS MX 600 Handler platform (2) Control cabinets Power distribution cabinet (2) ADP122H Fore pumps (2) A100L Fore pumps (2) Chillers Transformer, 125 KVA GUI, (3) Consoles Gas abatement, centrotherm Manuals Cables Hoses Computer Endpoint detectors 2007 vintage.
ALCATEL / ADIXEN / PFEIFFER AMS 4200 etcher/asher is a precision plasma etching and ashing equipment for a wide range of thin-film materials. It is used for producing high-quality geometric shapes, directional patterns, and structures with exacting accuracy. The system is ideal for sputtering, etching and cleaning processes. The unit boasts a highly compact profile and a wide array of innovative features tailored to meet the needs of today's etching and cleaning demands. Its advanced etching technology allow for precise, repeatable plasma etching and ashing processes that are capable of achieving very fine profile geometries. The machine features a very short processing time, while also offering superior process reliability due to its automated tool controls. The asset is specifically designed for the accuracy and repeatability that is required for sputtering, etching, and cleaning of thin-film materials. It has a full range of cleaning options ranging from isotropic etching to selective etching. Its advanced ion-beam deposition and pulsed processing systems allow for the production of very fine and consistent etch/ash patterns. Its open-chamber design provides an unrestricted view of the process while at the same time providing a constant environment that ensures a high level of uniformity throughout the etching/ashing process. The model also boasts a wide array of options for flexibility and customization. It has an adjustable flow nozzle, which allows for the maximization of the efficiency of particles being delivered to the substrate. The equipment also features a fully automated process controller, which ensures high repeatability and consistency during the etch/ash process. This process controller allows users to customize the plasma etching and ashing recipe for specific materials, ensuring the highest possible level of etching and ashing efficiency. ADIXEN AMS 4200 etcher/asher is an advanced and reliable etching and ashing system that is capable of providing a wide range of benefits to users. It provides greater accuracy and repeatability in etching and ashing processes, while also offering extremely short process times. Its open-chamber design and process controller allows for greater flexibility and customization, ensuring that users get optimal results for their etching and ashing processes.
There are no reviews yet