Used AXCELIS / FUSION RapidStrip 320 #9254126 for sale

AXCELIS / FUSION RapidStrip 320 is an advanced etch/ash process module designed for high speed production in the semiconductor fabrication industry. This Tool provides rapid silicon-etch rate of up to 120 Angstroms per minute and low-temperature ash processes to meet advanced technology leakage and dielectric relaxation requirements. FUSION RapidStrip 320 boasts a number of features, such as the SmartStrip process control algorithm, which ensures excellent etch uniformity and repeatability, as well as a high throughput production module capable of up to 500 wafers an hour. Its dual-polarity plasma box enables the processing of any type of etchant, such as fluorocarbon, fluorosilane and fluoroborane chemistries, ensuring maximal up-time and equipment utilization. AXCELIS RapidStrip 320 also utilizes a Chemical-Mechanical Polishing (CMP) system which eliminates the need for manual grinding, polishing and plating steps and ensures high-precision etching and ashing of the substrate. Its advanced etch-control technique combines factors such as plasma power, flow rate and the type of substrate materials before controlling the etch rate. This ensures that all steps are performed accurately, consistently and with minimal discrepancy. These features are coupled with advanced safety and environmental controls, such as the Clean Zone concept, which reduces Volatile Organic Compounds (VOCs) emissions. RapidStrip 320 also employs a high-definition Plasma Diagnostic System (PDQ) which continuously monitors plasma cleanliness and provides real-time adjustments to ensure minimal particle contamination. With its advanced technology and user-friendly interface, AXCELIS / FUSION RapidStrip 320 is the ideal system for efficient production of high-complexity substrates with exacting operational standards.