Used GASONICS / NOVELLUS L 3510 #9270101 for sale

GASONICS / NOVELLUS L 3510 is an advanced multi-purpose etcher/asher for MEMS, Semiconductor and Photovoltaic applications. It is capable of processing up to 28 wafers per system and up to 35 wafers per cassette, including 200mm and 150mm wafer sizes. GASONICS L 3510 benefits from excellent parallel processing capabilities, where many wafers are etched and ashed at the same time. It also utilizes intelligent pulsed processes and selective etch techniques to produce 3D structures with high feature resolution. NOVELLUS L 3510 offers uptime of more than 99%, coupled with outstanding wet process performance, which is achieved through high precision velocity and acceleration algorithms. In addition, all processes can be monitored, analysed and reported in full detail and all parameters are precisely adjustable to achieve a range of desired results. L 3510 is designed to provide improved cooling capabilities and the ability to process with both high-power and low-power sources such as CL2, O2, SF6, Ar, He and any combination of gases. It offers a truly versatile option for all types of etching and ashing applications, including backside oxide, oxide removal, trenching, deep reactive ion etching, dry etching and depth control etching. GASONICS / NOVELLUS L 3510's programmable end-to-end process feature allows for a full range of parameters to be set and adjusted, providing flexibility for accurate processing. Its power source can be used for etching and ashing of various materials including silica, silicon, tungsten and various metals. GASONICS L 3510 can handle wafers ranging from 170mm to 300mm sizes. Its advanced cavity and durable plasma processes, alongside its programmable RF generator, make this multi-purpose system an ideal choice for many etching and ashing applications. The machining process remains consistent and accurate over time and its inner space is designed to improve the maintenance process. NOVELLUS L 3510 uses GASONICS innovative Software Toolbox, which offers high performance real-time control and provides full visibility of the process with I/O monitoring. The Software Toolbox also allows users to easliy customize the process parameters by setting them for multiple processes, enabling efficient production and improved quality standards. Overall, L 3510 is an innovative and powerful multi-purpose device for a variety of etching and ashing applications. Its advanced features and high precision velocity and acceleration algorithms make it a fast and reliable choice for etching and ashing needs. With a robust and durable design, GASONICS / NOVELLUS L 3510 is an ideal choice for various industries and applications.