Used LAM RESEARCH 4520 #131594 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

Manufacturer
LAM RESEARCH
Model
4520
ID: 131594
Etcher, autoloader.
LAM RESEARCH 4520 etcher/asher is a high performance, multi-purpose etch/ash system designed to deposit and remove layers of material to create very precise patterns on both single-sided and double-sided wafers. It is capable of both etching and ashing a wide range of materials, such as metals, dielectrics, polymers, and ceramics. 4520 consists of multiple process chambers, including an etch/ash module, source control, pre-clean chamber, and a post-clean chamber. The etch/ash module is equipped with a beam of reactive chemistries. This beam, which is driven by a powered beam steering, is directed at the substrate from multiple angles and depths. This allows for the controlled, precise removal of layers from the wafer at high production rates. The source control module is an adjustable, remote chamber that can provide a flow of gas mixtures of different combinations and concentrations to the etch/ash module. This allows for detailed control of the etch/ash process. The pre-clean chamber is used to remove any residue from the substrate before it enters the etch/ash module. This chamber uses a combination of chemical, high temperature, and mechanical processes to ensure that the wafer is clean before processing. The post-clean chamber is also used to remove residue left behind in the etch/ash module. This trap chamber employs a series of filters to ensure that all particulate matter or residue left in the etch/ash module is removed before the wafer is exited. LAM RESEARCH 4520 is an adaptable, precise, and reliable etch/ash system. It features a powerful beam steering and precise multi-directional and depth control of the beam. Its multiple process chambers provide precise control of the chemistries used as well as clean pre and post processing. This makes 4520 a highly efficient and precise etch/ash system.
There are no reviews yet