Used LAM RESEARCH 9600CFE #9396017 for sale

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ID: 9396017
Wafer Size: 6"-8"
Vintage: 2001
Etcher, 6"-8" (2) Chambers: Metal etch Resist removal CE Marked 2001 vintage.
LAM RESEARCH 9600CFE is an etching/asher equipment that offers high-precision die-level (5µm) etching and imaging capabilities to enable the most complex device designs. LAM RESEARCH 9600 CFE offers wet or dry plasma etching with its configurable gas delivery, enabling maximum process control and accuracy. 9600CFE is fully compatible with all major vacuum systems and metrology tools. 9600 CFE is designed for high-resolution, precise etching with low deflection factors. This system can be used for a variety of process challenges, including deep contact etching, shallow trench isolation, nanoscale feature patterning, fine line patterning, and precise etching of 3D structures. It features a modular chamber configuration that enables single- or multiple-chamber etch applications for increased efficiency. LAM RESEARCH 9600CFE also comes with an integrated RF generator for low-field plasma discharge, offering increased process control. LAM RESEARCH 9600 CFE's advanced automation and control systems ensure high productivity and accuracy. It features a multi-station robotic wafer transfer port for quickly loading and unloading, along with extended operator safety features. It also has embedded diagnostics to continuously monitor and maximize efficiency. 9600CFE offers a comprehensive software program that allows for highly optimized predictive process control. This program is fully compatible with Windows, allowing customers to easily control the unit and monitor progress. The user-friendly software simplifies the process of controlling etch parameters and offers the ability to save, retrieve, and edit programs. 9600 CFE is a highly reliable and repeatable aher/etcher machine that is perfect for cutting-edge device engineering applications. Its small footprint and ergonomic design make it a great fit for a variety of settings, including research and development labs, industrial fabs, semiconductor facilities, and universities. With its flexible configurability, advanced automation, and predictive process control, LAM RESEARCH 9600CFE is a great choice for etching accuracy and reliability.
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