Used LAM RESEARCH Exelan A6 #9093942 for sale

LAM RESEARCH Exelan A6 is an advanced etcher / asher equipment designed for etching and ashing processes. It is built with a powerful, modular design architecture that allows for high performance and efficient operation in demanding production environments. Exelan A6 utilizes precise etching and ashing technology to enable the most precise substrate structures to be created. The system is composed of a large, cost-efficient turbo PECVD (plasma-enhanced chemical vapor deposition) unit that features a low pressure radio-frequency plasma chamber and a high-speed conveyor. This machine features a high speed gas distribution that allows higher and precisely controlled process rates. LAM RESEARCH Exelan A6's plasma chamber, RF generator, and controller are designed to achieve high efficient etching and ashing process. The chamber volume is large enough to accommodate large substrate sizes and long process times, making it an ideal tool for large-scale production. Exelan A6 supports advanced automation that can precisely control gas flow, pressure, temperature, RF power, and other process parameters. The software lets users configure up to twenty independent process recipes that can be saved and reused for future processing. These integrated automation features provide the ability to track the process recipes, monitor the process, and diagnose any issues that may arise during processing. The integrated clean room and isolation systems enable LAM RESEARCH Exelan A6 to operate in clean environments. With its built-in safety features and advanced diagnostics, the asset can automatically shut down in case of emergencies and can detect and report any issues such as abnormal pressures, over temperature, and power disturbances. Exelan A6 provides a reliable and efficient platform for the production of etching and ashing processes, allowing integration with other processes such as lithography, embossing, vacuum processes, and other associated processes. Ultimately, the model can quickly and easily process micro and nano-sized substrate structures for a variety of industries.