Used LAM RESEARCH Rainbow 4420 #9374752 for sale
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ID: 9374752
Wafer Size: 5"
Oxide etcher, 5"
Bulkhead system mount with tunnel covers
HINE 38A Open cassette
Send / Receive indexers
LED Monitor
ADVANCED ENERGY RF Generator
Moving gap
Back helium colling
Belt driven load station
Standard load station shuttle spatula
Upper chamber gap drive encoder
Aluminum upper chamber electrode
Single lower chamber endpoint detector (405 / 520 nm)
Low pressure chamber manifold
HPS Valve for chamber isolation
AC-2 Chamber pressure controller
Lower chamber RGA port
MILLIPORE CMHT-11S02 10 Torr Chamber manometer
MILLIPORE CMLA-21 100 Torr backside helium manometer
TYLAN GENERAL CMHT-11S02 10 Torr reference manometer
(8) Orbital gas boxes
(1300) UPC: He (50 SCCM)
Trip breakers AC / DC power box
Power supply: 208 V, 175 A, 60 Hz, 3 Phase, 5 Wires.
LAM RESEARCH Rainbow 4420 is a highly advanced etcher / asher equipment specifically designed for use in semiconductor processing. The system utilizes advanced etching technology to enable precise etching of a wide range of substrates, such as silicon wafers, oxide layers, and various dielectrics. Rainbow 4420 features a modular construction with several configurable options. It contains a high-efficiency wet processing chamber, a gas showerhead, a plasma-assisted etching unit, and an advanced distribution machine for power, gas, and coolant that are all integrated into a single unit. The processing chamber is designed to maintain a precise temperature and pressure environment, allowing for precise etching at high speed. The gas showerhead utilizes highly concentrated buffers, along with low temperature plasma to maintain the temperature of the etching gases and ensure maximum efficiency and reliability of operation. The plasma-assisted etch process offers precise control of the etching process, ensuring a high-quality result. LAM RESEARCH Rainbow 4420 also includes an advanced laser imaging tool, which enables the precise handling of a wide range of substrates. This makes it ideal for low-temperature, higher-precision etching, as well as high-current, high-resolution processes. Finally, Rainbow 4420 also has a series of safety features built into its construction, ensuring the complete safety of all operators. These include a hydrogen sensor, an inert gas delivery asset, an emergency shutdown model, and an integrated diagnostics equipment. The diagnostics system monitors the temperature, pressure, and other parameters and notifies the operator when any one of these values is outside of its pre-determined range. Overall, LAM RESEARCH Rainbow 4420 is an advanced etching and ashing unit designed to deliver precise, high-quality results. Its combination of precision etching capability, customizable processing variables, and powerful safety features make it an ideal choice for semiconductor processing.
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