Used LAM RESEARCH TCP 9600 #138939 for sale

LAM RESEARCH TCP 9600 is an etcher/asher designed for the production of wafers, photomasks, substrates, and packages in the semiconductor fabrication process. LAM RESEARCH TCP9600 is engineered with specific process parameters in mind, and is built for the most difficult substrates requiring high uniformity and uniformity of dielectrics. TCP-9600 is designed to deliver higher throughput, higher quality etching, and greater process control. The LAM TCP9600 etcher/asher is built with a high-performance wafer processing chamber featuring advanced RF optimized etching technology. TCP 9600 chamber is sized to hold up to 12 wafers at a time and is outfitted with an adjustable RF power and frequency to precisely control the selectivity and uniformity of the etch process. The etcher/asher also features an integrated HF module to ensure there is no potential impact to the critical gas. LAM RESEARCH TCP-9600 is engineered in compliance to the SEMI S2 compliance standard and is fully modular. This allows for easy modification and configuration of the etcher/asher to meet customer specific requirements. LAM RESEARCH TCP 9600 also features a proprietary RF control system which is designed to optimize the etch rate and edges profiles in order to achieve consistent, reliable, and repeatable results. The RF frequency, power level, and gases delivered to the chamber are all adjustable, allowing for independent optimization for most materials. LAM RESEARCH TCP9600 also incorporates a synchronized, multi-gas mono process that not only improves precision, but also reduces the overall time of the entire etching process. Finally, TCP-9600 etcher/asher also features a high performing anti-reflection coating (ARC) module which is designed to enable higher etch rates and higher selectivity when processing materials such as quartz, polyimide, and other dielectrics. This ensures that the ARC coating is uniformly distributed over the substrate surface and improving the quality of the foils. In summary, TCP9600 etcher/asher is a precision etching tool that is purpose-built for the production of wafers, photomasks, substrates, and packages. Performance and reliability is unbending as this unit is built in accordance to SEMI S2 compliance standards. Through its advanced RF control system and adjustable parameters, TCP 9600 delivers optimum etch rate and optimal uniformity over varying substrate and conditions.