Used LAM RESEARCH TCP 9600 #9116888 for sale

LAM RESEARCH TCP 9600 is an etcher/asher equipment used in the semiconductor industry to precisely etch or asher semiconductor wafers and substrates. The system is based on a patented Scalpel Technology, which utilizes a highly conformal etch or asher process that provides an excellent edge definition, high throughput, and uniform etch rate across both large and small wafer sizes. The etcher/asher achieves this high level of performance by utilizing two high frequency, high-power plasmas, the main plasma and the reaction plasma, which react in close proximity to the surface. LAM RESEARCH TCP9600 is designed for dual role functionality, that is, both etch and asher processes. It offers flexible end-point detection capabilities with both optical and physical endpoint detection modes. This allows operators to accurately monitor deposition, etch and/or asher layer thickness. It also has an auto optimization feature that allows it to automatically tune and optimize processes for best performance. TCP-9600 has an open unit architecture and is equipped with advanced controls for process monitoring, data collection and process recipe customization. This open architecture allows users to develop custom recipe files and plasma control strategies, as well as communications capabilities for equipment networking and control. In addition, the machine is equipped with various RF sources that allow the user to maintain a desired plasma density and uniformity across the substrate surface. This feature helps increase the etch or asher rate and quality, while providing process stability. The tool has also been certified to meet SEMI S2 safety standards, and is backed by a dedicated technical support team that assists with prompt and accurate process optimization, maintenance, and repair. With its highly precise capabilities, LAM RESEARCH TCP-9600 etcher/asher is a great solution for semiconductor manufacturers seeking an efficient, reliable and cost-effective production process.