Used PLASMATHERM VLR 702-PM 770I-10R #9259208 for sale

This PLASMATHERM VLR 702-PM 770I-10R has been sold.

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ID#: 9259208

Manufacturer:

PLASMATHERM

Vintage:

1999

Equipment Details:

Dry etcher

EBARA AA10N Dry pump
Pumping speed: 1300 l/min
TAITEC UC-70P Chiller
Gases: CF4, CHF3, CI2, BCI3, O2, N2
Diameter of lower electrode, 10"
EDWARDS STP-H803C Turbo pump
2CN-H803C Turbo controller
VLR 700 VAT Gate valve
Operating system: Windows NT Workstation 4.0
Power box
Cabinet

Power supply: 200 V, 50/60 Hz, 3 Phase
1999 vintage.
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