Used PLASMATHERM VLR 702-PM 770I-10R #9259208 for sale
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ID: 9259208
Vintage: 1999
Dry etcher
EBARA AA10N Dry pump
Pumping speed: 1300 l/min
TAITEC UC-70P Chiller
Gases: CF4, CHF3, CI2, BCI3, O2, N2
Diameter of lower electrode, 10"
EDWARDS STP-H803C Turbo pump
2CN-H803C Turbo controller
VLR 700 VAT Gate valve
Operating system: Windows NT Workstation 4.0
Power box
Cabinet
Power supply: 200 V, 50/60 Hz, 3 Phase
1999 vintage.
PLASMATHERM VLR 702-PM 770I-10R is an advanced etcher/asher designed for optimal performance in large-scale industrial applications. It features a 10" manifold tray and a 7 job chamber equipment, allowing for full control over etching and ashing processes. The VLR 702-PM boasts an impressive accuracy of ± 0.5 µm, allowing for extremely precise etching results. Additionally, uniformity across the job tray is ensured with ± 1.0 µm accuracy. The VLR 702-PM is equipped with an advanced programmable controller, offering up to 16 memory stores with nine recipes for various jobs. Additionally, this controller allows easy setup and adjustment of the etching/ashing parameters, including power, gas flow, bias, and other job-specific settings. All settings and results can be monitored in real-time via the VLR 702-PM's graphical user interface. In addition to these features, the VLR 702-PM features a sophisticated safety system designed to protect the user and the machine from harm. This includes a lid locking mechanism, a keyless trigger lock, and an emergency stop button, allowing for maximum safety in all etching/ashing jobs. Software and hardware are optimized to deliver maximum etching and ashing quality and performance. The VLR 702-PM is equipped with a high-performance motor and a set of precision-forged stainless steel nozzles that ensure an even plasma distribution throughout the small-gap area. Both the computer-controlled high-precision piezo modulator and the adjustable gas filter ensure that no contaminants are introduced into the ashing process. For maximum convenience, the VLR 702-PM has a built-in exhaust unit that collects and extracts the released etching/ashing gases throughout the process. This prevents buildup of hazardous materials, promoting user safety and overall unit performance. Overall, VLR 702-PM 770I-10R is an advanced etcher/asher offering superior quality and performance for industrial etching and ashing applications. This machine offers excellent accuracy, exceptional safety, and superior user convenience, ensuring that etching/ashing jobs are completed quickly and precisely.
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