Used TEGAL 903E #9374755 for sale

TEGAL 903E is an etcher / asher specifically designed for use in semiconductor processing. It is a thermal evaporator (or evaporation equipment) which uses an electron-beam gun to evaporate resist and metallization layers onto the surface of a semiconductor wafer. TEGAL 903 E is able to process wafers up to 8 inches in diameter and has a maximum throughput of up to 60 pieces per hour. It is equipped with auto-focusing capability, over-current protection and adjustable crucible temperature in order to ensure optimal and consistent results. 903E is positioned to be a cost-effective and reliable solution to meet the growing demand for more integrated and efficient processing of complex semiconductor devices. It has a number of features which make it attractive to the semiconductor industry, including a high-precision motion system, a closely coupled control unit and outstanding capacity for tight process control. The machine is also designed for easy integration with existing wafer processing systems by offering direct control of other vital process parameters and components such as temperature and pressure. The tool is designed to be able to rapidly and accurately evaporate aluminum and titanium as well as other alloys and metals with thicknesses from 1 to 1000 nanometers. The millijoule electron beam gun used in 903 E enables precise and efficient deposition. In addition, the asset has two dedicated substrate manipulators for transfer of substrates and superior control of substrate positions. TEGAL 903E also features an array of user-friendly features such as a graphic user interface, a powerful software package, auto-calibration and a self-diagnostic model. The user-friendly interface allows operators to easily set up and monitor the etching process. Furthermore, the equipment has remote monitoring and control capabilities to enable fast and optimized operation. TEGAL 903 E is ideal for customers who need high-performance processing of semiconductor substrates with tight process control. It is suitable for both batch and continuous production processes and is capable of processing substrates of varying sizes and thicknesses. The system's high-precision motion unit and closely coupled control machine ensure an outstanding level of precision and process control with minimal contaminations. 903E is a reliable and cost-effective etcher / asher for advanced processes in the semiconductor industry.