Used TEL / TOKYO ELECTRON CS-600 #9380680 for sale

ID: 9380680
Vintage: 1999
Plasma cleaner 1999 vintage.
TEL / TOKYO ELECTRON CS-600 ('TEL CS-600') is an automated photoresist equipment that is used in the manufacturing of semiconductor devices. The system can be configured with either a single wafer cassette or dual wafer cassette loader and is capable of handling up to 200mm wafers. The unit features an optimized cassette to cassette wafer handling, eliminating the need for manual unloading of wafers. TOKYO ELECTRON CS-600 employs an advanced computer machine to control the operations and an intuitive user interface to simplify operations. The tool allows for two operating modes - local and remote. In local mode, the asset can be operated from the external operator control panel. In remote mode, the model can be operated from a computer on the local area network. CS-600 has a full range of cleaning processes for pre-bake and post-exposure bake sequences. Its cleaning processes include rinse and spin-dry, spray and spin-dry, jet and spin-dry, air-blow and spin-dry. In addition to these, there are manual and auto-grained cleaning processes for special cleaning needs. TEL / TOKYO ELECTRON CS-600 utilizes an advanced scanner and motion control equipment to inspect and optimize the pattern placements and overlays of photoresist features on wafers. It features a fully automated software-driven optical aligner with adjustable spot size and depth-of-focus range. TEL CS-600 also features an advanced loader/unloader system to reduce the throughput time, allowing faster handling of photoresist materials. An integrated workbench reduces loading and unloading time, while a fully automated cleaning unit improves the transfer of photolithography materials. TOKYO ELECTRON CS-600 also features a programmable format setting which allows flexibility when handling different types of wafers. The machine is equipped with advanced safety features to ensure safe operation. The safety features include an auto-stop when the operator moves away from the tool, as well as an auto-unlock when the machine has been unused for more than a certain amount of time. CS-600 also includes an emergency stop button that is readily accessible to the operator. In conclusion, TEL / TOKYO ELECTRON CS-600 is an advanced, automated photoresist asset that provides greater throughput and improved accuracy for manufacturing processes. Its advanced optical aligner and loader/unloader systems provide highly efficient and quality performance, while its intuitive user interface and safety features simplify operations and ensure safe operation.
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