Used TEL / TOKYO ELECTRON Formula-HV #9190560 for sale

TEL / TOKYO ELECTRON Formula-HV is a high-performance, high-productivity etching equipment designed for the most rigorous requirements in processes including semi-isotropic etching, anisotropic etching, ultrahigh-aspect-ratio teardrop etching, and copper (Cu) pillar etching. It is a single-wafer parallel plasma etcher (or "asher") with a range of capability that allows for improved throughput and extended process modules - from standard etching jobs to more advanced processes. TEL Formula-HV utilizes innovative and efficient process technologies to achieve high-quality, stable, and repeatable etch profiles. The advanced control features of the system deliver intricate, high-precision etching to meet the requirements of very large and extremely deep etch processes. The uniformity of the etching achieved with TOKYO ELECTRON Formula-HV is among the best in the industry. Formula-HV is equipped with multiple RF sources, enabling the etching process to be tailored to the specific application. This allows for a degree of flexibility that provides a much wider range of etch possibilities than traditional etch systems. The unit also provides a wide range of adjustment parameters, enabling the user to adjust plasmas, ions, and electrode power sources for the best results. The sophisticated automation of TEL / TOKYO ELECTRON Formula-HV eliminates human operator intervention for critical applications. It enables non-contact, repeatable, and accurate process control for etching depths and feature profiles. The machine also features an enhanced diagnostics and maintenance tool, allowing users to troubleshoot and maintain the asset quickly and easily. TEL Formula-HV also comes with a comprehensive suite of software tools for data acquisition and analysis, as well as for recipe development and process optimization. It is compatible with multiple etch masks, including brightfield mask (used for shallow etches) and darkfield mask (for deeper etches). The asher also provides several shields offert, allowing users to customize the model for their particular application. TOKYO ELECTRON Formula-HV is an advanced, high-performance, and reliable etcher that offers precise and stable etching for the most demanding applications. Its advanced controls, wide range of adjustment parameters, and flexibility provide users with a wide variety of etching possibilities. Its sophisticated automation and comprehensive software suite allow users to develop and optimize their processes quickly and easily.