Used AXCELIS / FUSION 200 PCU #9106832 for sale

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AXCELIS / FUSION 200 PCU
Sold
ID: 9106832
Wafer Size: 6"
Photostabilizer, 6".
AXCELIS / FUSION 200 PCU is an exposure equipment designed for use in industrial and laboratory settings. This system provides high-precision, user-friendly exposure control for a variety of materials and process conditions. The unit is made of a beam delivery cabinet and a process chamber, with two integrated software programs to ensure efficient, accurate, and repeatable results. The beam delivery cabinet contains a set of lenses and mirrors that control the delivery of the electron beam to the process chamber. The path of the beam is adjustable using the control knobs at the front of the cabinet to precisely manipulate the beam steering. This allows for the beam to be accurately focused and directed onto the target material. The process chamber is a vacuum chamber used to create the ideal substrate environment for the electron beam to be exposed. Specialized UHV flanges are attached to the top and bottom of the chamber to ensure a clean and dry environment. It also contains an isolated chamber for substrate heating and cooling, allowing for precise adjustments in the temperature and environment within the chamber. Additionally, gas inlet and vent holes provide clean inlet gas and create a safe venting machine for potentially hazardous particles during operation. FUSION 200 PCU software provides the user with powerful, user-friendly tools to control the exposure processes. It enables users to quickly and easily configure parameters such as beam current, substrate temperature, pressure, and more. The library of predefined recipes enables to quickly create and store set points, making it easier to repeat processes. The software also contains automatic fault detection and rectification modules, alerting the user of any abnormalities during the exposure process and guiding them to quickly rectify it. This ensures greater accuracy and repeatability of the exposure process. Overall, AXCELIS 200PCU is a powerful, reliable tool for achieving accurate, high-precision exposure of a variety of materials. The combination of the beam delivery cabinet, process chamber and the user-friendly software makes it an ideal choice for industrial and laboratory settings.
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