Used AXCELIS / FUSION 200 PCU #9182824 for sale

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AXCELIS / FUSION 200 PCU
Sold
ID: 9182824
Vintage: 2001
Microlite photostabilizer Software version: Ver 3.27 Process: Fusion bake CIM: Linked SMIF System: No Handler system: No Process chamber: No Wafer handler: (2) Platform with wafer tower sensor, 8" (3) Axes robot assembly (1) Operator interface: LCD Panel Process chamber: Thermochuck with lifter pin assembly Irradiator unit Accessories: High voltage power supply box 208V 2001 vintage.
AXCELIS / FUSION 200 PCU is an advanced exposure equipment for expediting the development and production of devices across a wide range of applications in the semiconductor industry. The system consists of an X-ray generator, an imaging camera, a set of detectors and data acquisition electronics, as well as a host of other subcomponents. The X-ray generator produces a high-energy beam of electrons which is directed toward the material to be exposed. The elec tron beam is then routed through a series of lithography masks, each containing a pattern of features to be imprinted onto the substrate material. The imaging camera captures the resulting exposed patterns and stores them as digital images. The detectors measure the exposure levels of the illuminated material, while the data acquisition electronics record and store these levels in memory. This data is then used by the unit to generate exposure profiles that can be used to optimize exposure settings or to control process parameters. FUSION 200 PCU is capable of supporting a range of process parameters, making it capable of producing highly-detailed images with a good level of exposure control. The machine can be used to take multiple exposures of different substrates and materials, allowing designers to produce patterns with a range of feature sizes. This can facilitate the production of tiny, delicate features, such as contact windows, on a substrate. The tool also has a range of safety features, such as automatic exposure limit monitoring, which can provide protection for workers and the environment. Additionally, the asset has Ethernet-enabled digital communication, allowing for remote access and integration with other systems. AXCELIS 200PCU is a reliable and highly efficient exposure model, suitable for high-accuracy lithography applications across a wide range of industrial and academic settings. With its powerful imaging camera and range of parameters, the equipment provides a great tool for the study, development, and production of a variety of devices.
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