Used ATMI / ECOSYS Unichem-2900 #9154739 for sale

ATMI / ECOSYS Unichem-2900 is a state-of-the-art wafer and mask scrubber that provides automatic cleaning and contamination control of a wafer surface and masks. The advanced automated cleaning and contamination control features of ATMI Unichem-2900 enable it to be used in semiconductor, flat panel, solar cell, optoelectronics, and medical device production lines. ECOSYS Unichem-2900 incorporates advanced ultrasonic cleaning technology to effectively and uniformly clean both wafers and masks, while preserving the component substrate and mask patterns. The device includes a pair of 10 inch diameter scrub brushes and an evaporative water spray system and provides precise control of the scrubbing process. The cleaning process is further enhanced by the use of an oscillating motion of the scrub brushes, which improves the uniformity of the cleaning process and minimizes the risk of damage to the substrate. In addition, Unichem-2900 incorporates a line accumulation system on the mask side that prevents accidental removal of parts or debris from the process line. Furthermore, it also features an anti-sticking cleaning system on the wafer side, which prevents the adhesion of photoresists, thin films and organic residues to the wafer during processing. ATMI / ECOSYS Unichem-2900 has a distinctive modular design and can be integrated with other compatible process equipment, such as a deposition chamber, CMP unit or inspection systems. This allows the switchover between processing wafers and stripes without the need of manual intervention. The device also has a relatively small footprint and can be operated using a simple touchscreen interface, making it a compact and user-friendly solution for a variety of production lines. Overall, the versatile and highly efficient ATMI Unichem-2900 automated wafer and mask scrubber is an ideal solution for production lines looking to adopt cost effective, precise and efficient cleaning and contamination control processes. The device can also be customized to meet special application requirements.