Used EATON NOVA / AXCELIS NV 6200A #9275794 for sale

This EATON NOVA / AXCELIS NV 6200A has been sold.

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ID#: 9275794

Model:

NV 6200A

Vintage:

1990

Equipment Details:

Medium current implanter
Missing and broken parts
CTI CRYOGENICS 8500 Compressor
Cryo-Torr 8 Cryo pump

Dry pumps:
EDWARDS QDP80
EDWARDS QDP40 + QMB250
Power supply: 200-208 V, 50/60 Hz, 6.6 kV, 3 Phase

Process gas: BF3, PH3, AsH3

Power supply: 208 V, 70 A, 3 Phase
1990 vintage.
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