Used KLA / TENCOR / THERMA-WAVE TP 500 #9296615 for sale

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KLA / TENCOR / THERMA-WAVE TP 500
Sold
ID: 9296615
Vintage: 1996
Ion dose monitor system 1996 vintage.
KLA / TENCOR / THERMA-WAVE TP 500 is a high-performance wafer testing and metrology equipment. It provides users with accurate and reliable measurements of both physical and electrical properties of semiconductor wafers. The system features robust hardware and software, which allows users to implement complex tests with reproducible results across different substrates. KLA TP 500 is designed to measure both wafer shape and optical critical dimensions (OCD) on patterned wafers up to 5" in diameter. It can also be used to measure thin film thickness as well as electrical parameters such as resistance and conduc¬tance. TENCOR TP-500 is equipped with a large optical resolution microscope with an integrated pattern recogni¬tion processor and a CCD laser scanner that are both capable of handling various types of substrate materials. Its automated focus motor allows users to quickly shift between different focal lengths for accurate measurements of multiple layer structures. Additionally, its integrated vision unit can be used to ensure accurate alignment for overlay measurements. The machine is also equipped with a high-precision wafer stage, which is capable of accurately positioning the wafer in order for precise OCD measurements. Additionally, the stage is lined with a fabric-covered wafer holder, which helps reduce wafer damage caused by static electricity. In terms of data management, the tool is equipped with a powerful data processing suite that allows users to quickly analyze measurement results and generate reports. The suite supports various web-based services for remote data access as well as efficient data sharing. The asset also comes with a comprehensive support package that includes wafer pattern libraries, training materials, and troubleshooting guides. Overall, KLA / TENCOR / THERMA-WAVE TP-500 is an advanced wafer testing and metrology model that offers superior accuracy and reliability. Its reliable and efficient hardware and advanced software allow users to implement complex tests with reproducible results that conform to critical industry standards.
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