Used VARIAN 300XP #9103077 for sale

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VARIAN 300XP
Sold
ID: 9103077
Wafer Size: 8"
Implanter, 8".
VARIAN 300XP ion implanter and monitor is an advanced piece of technology that offers users a reliable solution for implanting impurities into single-crystal substrates in order to improve performance. This ion implanter features an unmatched control of implant parameters, with capability to dynamically vary bias voltage, beam spot intensity and dose duration. VARIAN 300 XP uses a high-current, pulsed-mode beam to transfer energetic atomic species, and comes equipped with a sophisticated stationary ion source and beam steering and shaping optics. The equipment can be adapted to various configurations, such as in-situ gas cleaning with plasma ash, top-up implant, and gas or liquid diffusion. 300XP utilizes a robust, high-performance beam optics design, allowing for an accurate beam focus of up to 8-micron spot size and excellent uniformity. This provides accelerated implant doping processes and a high-fidelity implant process. Additionally, the system has configurable alignment transformation, which is used to facilitate intricate implant pattern and alignment inaccuracies. Furthermore, 300 XP is equipped with an in-line Faraday cup monitoring unit which monitors the ion beam during implantation, ensuring accurate and repeatable implants. VARIAN 300XP also offers a range of customizable safety options, including pressure interlocks to prevent any accidental exposure to charged particles. Also included is a Magnetic Interlock Machine (MIS) which shuts down the beam when it senses magnetic interference. This feature ensures the integrity of the tool's performance and the safety of its operators. In order to ensure process repeatability, the asset offers automated process compensation, including dosimetry, current monitoring, substrate data collection, and substrate motion compensation. This helps to ensure the delivery of uniform, repeatable doping profiles. The model also features advanced operating modes such as full-range navigation, entry-level programming, macro programming, and batch processing. VARIAN 300 XP is an exceptionally reliable and cost-effective solution for ion implantation. The equipment is designed for easy integration and operation, offering excellent control, repeatability, and safety. With all these advanced features, 300XP is an excellent choice for any ion implantation application.
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