Used PHILIPS / FEI Helios NanoLab 600 #9229169 for sale
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ID: 9229169
Vintage: 2009
Dual beam Focused Ion Beam system (FIB)
Without loadlock
With regular stub sample holder
Process: Xsection preparation / Imaging
Pre-pump with chiller
Missing parts / Accessories:
High voltage power supply for e-beam defect
2009 vintage.
PHILIPS / FEI Helios NanoLab 600 is a dual beam ion milling equipment designed for precision nanofabrication applications. It combines focused ion beam (FIB) and scanning electron microscope (SEM) capabilities in a single versatile platform that offers high precision, high speed and high imaging resolution. The system has a two gun FIB chamber that is used to deliver a high beam current and sputter material during milling operations. Its adjustable high voltage grid allows for beam control during milling. The FIB chamber also contains a vacuum unit capable of reaching a pressure of below 1x10-6 Torr. The dual beam machine ensures that the same area can be milled and imaged in a single pass, thus minimizing the total cycle time. FEI Helios NanoLab 600's scanning electron microscope (SEM) is capable of advanced imaging functions and is enhanced with the optional E-beam imaging package. This package increases the imaging tool's capabilities, allowing for superior imaging resolution, high-sensitivity EDS elemental analysis and x-ray diffraction (XRD). The asset also incorporates automated systems for sample handling and replacement. The automated sample-leveling platform moves up and down, as needed for milling/etching and imaging. An automated lid opening model is implemented for removal and replacement of sample holders. These features enable uninterrupted automated sample processing. The equipment boasts a high-precision x and y-axis stage with a feature size accuracy of 1nm. The stage is driven by separate digital servo amplifiers, which makes it suitable for sub-micron applications. Additionally, it is equipped with air bearing system that ensures smooth and precise sample manipulation. In conclusion, PHILIPS HELIOS NANOLAB 600 is an advanced ion-milling unit that provides a versatile dual-beam platform for milling and imaging nanostructures with high precision. Its automated sample handling machine, high-precision x and y-axis stage, and dual gun FIB chamber all combine to make it a powerful tool for nanofabrication.
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